Fumitaka Kume

Polycrystalline silicon mass and process for producing polycrystalline silicon mass

SYSTEM FOR PRODUCING POLYCRYSTALLINE SILICON, APPARATUS FOR PRODUCING POLYCRYSTALLINE SILICON, AND PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON

CORE WIRE HOLDER FOR PRODUCING POLYCRYSTALLINE SILICON AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON

Carbon electrode and equipment for manufacturing polycrystalline silicon rod

Method for measuring carbon concentration in polycrystalline silicon

Carbon electrode and apparatus for manufacturing polycrystalline silicon rod

Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod

Polycrystalline silicon rod and production method for polycrystalline silicon rod

OZONE GAS GENERATION DEVICE, SILICON OXIDE FILM FORMATION METHOD, AND EVALUATION METHOD OF SILICON SINGLE CRYSTAL WAFER

Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rod