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Fumiyoshi Urano

Wako Pure Chemical Industries, Ltd

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Publication

Featured researches published by Fumiyoshi Urano.

Archive | 1991

Chemical amplified resist material containing photosensitive compound capable of generating an acid and specific polystyrene copolymer having functional groups that become alkali-soluble under an acid atmosphere

Fumiyoshi Urano; Masaaki Nakahata; Hirotoshi Fujie; Keiji Oono

Archive | 1996

Resist composition for deep ultraviolet light

Fumiyoshi Urano; Takanori Yasuda; Akiko Katsuyama; Kazuhiro Yamashita

Archive | 1996

Polymer and resist material

Fumiyoshi Urano; Hirotoshi Fujie; Keiji Oono

Archive | 1995

Pattern formation process

Fumiyoshi Urano; Hirotoshi Fujie; Keiji Oono; Takaaki Negishi

Archive | 1991

Chemical amplified resist material

Fumiyoshi Urano; Masaaki Nakahata; Hirotoshi Fujie; Keiji Oono

Archive | 1996

Process for forming a pattern on a semiconductor substrate using a deep ultraviolet absorbent composition

Fumiyoshi Urano; Keiji Oono; Hiroshi Matsuda; Masayuki Endo; Satoshi Kobayashi

Archive | 1992

Pattern forming contrast enhanced material utilizing water soluble photosensitive diazo compound and pattern forming method

Yoshiyuki Tani; Masayuki Endo; Kazufumi Ogawa; Fumiyoshi Urano; Masaaki Nakahata

Archive | 1996

NEW WATER-SOLUBLE POLYMER, ANTIREFLECTION FILM MATERIAL CONTAINING THE SAME, AND METHOD FOR FORMING PATTERN BY USING THE MATERIAL

Yasuyoshi Mori; Keiji Ono; Fumiyoshi Urano; 桂二 大野; 康嘉 森; 文良 浦野

Archive | 1994

Far-ultraviolet absorbent and method of forming pattern by using same

Masataka Endo; Satoshi Kobayashi; Yasushi Matsuda; Keiji Ono; Fumiyoshi Urano; 桂二 大野; 智 小林; 裕史 松田; 文良 浦野; 政孝 遠藤

Archive | 1991

Resist material and process for forming pattern using the same

Fumiyoshi Urano; Masaaki Nakahata; Hirotoshi Fujie; Keiji Oono

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Masayuki Endo

Panasonic

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Akiko Katsuyama

Panasonic

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Jiro Sugimoto

Kansai Medical University

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Kazuhiro Yamashita

Panasonic

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Masaru Sasago

Osaka Prefecture University

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Satoshi Kobayashi

Panasonic

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Takanori Yasuda

Panasonic

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Hiroshi Matsuda

Panasonic

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Kazuhito Fukasawa

Panasonic

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Masataka Endo

Panasonic

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