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international conference on micro electro mechanical systems | 2012

Air-flow based multifunctional tactile display device with multi-jet integrated micro venturi nozzle array

Masataka Arai; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Fumikazu Oohira; Hidekuni Takao

In this paper, the first air-flow based multifunctional tactile display with 1-D mixed array of integrated air nozzles and multi-jet integrated micro venturi atomizers are presented. This device realizes simultaneous tactile presentation of “object surface shape” by distributed air-flow pressures and “sense of cold (cryesthesia)” by arrayed liquid mist injection. A new type venturi atomizer with multi jet structure was developed to control the mixture ratio of different liquids for temperature control. 2-D tactile display can be realized by simply stacking the 1-D array devices. Through the evaluations with fabricated devices, multifunctional and distributed tactile presentation has been successfully demonstrated for the first time.


international conference on micro electro mechanical systems | 2013

Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array

Hidetaka Yamasaki; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao


Ieej Transactions on Sensors and Micromachines | 2013

Development of High Accuracy Spray Coating Method using Multi-layer Coat

Mikio Akamatsu; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki


international conference on optical mems and nanophotonics | 2012

Design and fabrication of electrostatically driven in-plane MEMS rotational mirror with electrostatic rotary encoder

R. Shinozaki; Fumikazu Oohira; Kyohei Terao; Takaaki Suzuki; Fusao Simokawa; Hidekuni Takao


The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP | 2014

E-2-4 Development of Local Light Stimulation Device for Neural Network Analysis

Hidetaka Ueno; Shoji Komai; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Hidetoshi Kotera; Takaaki Suzuki


The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP | 2014

E-2-5 Plasma Resistant Evaluation of Photoresist Treated by Vacuum UV Cure Process in ECR Plasma Etching

Haruyosi Hama; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki


Journal of the Japan Society of Applied Electromagnetics and Mechanics | 2014

Development of an electromagnetic micropump with photosensitive magnetic nanocomposite

Yusaku Ueda; Tasuku Nakahara; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Hidetoshi Kotera; Takaaki Suzuki


The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP | 2013

E-1-1 感光性ナノコンポジットを用いた磁気駆動型マイクロポンプの開発(マイクロナノメカトロニクス(1),口頭発表)

Yusaku Ueda; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki


The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP | 2013

E-2-4 Polymer-MEMSミラーへのセンサ集積化に関する研究(マイクロナノメカトロニクス(2),口頭発表)

Hirofumi Yamashita; Kyohei Terao; Hidekuni Takao; Fusao Simokawa; Fumikazu Oohira; Takaaki Suzuki


The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP | 2013

E-1-2 ソフトリングラフィにおけるPDMSの転写精度評価(マイクロナノメカトロニクス(1),口頭発表)

Hidetaka Tamai; Hidekuni Takao; Fumikazu Oohira; Kyohei Terao; Fusao Simokawa; Takaaki Suzuki

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Hidekuni Takao

Toyohashi University of Technology

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Fumikazu Oohira

The Open University of Japan

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