Fusheng Ma

Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators

Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 V bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using released DSRR structures shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters.

Polarization-sensitive microelectromechanical systems based tunable terahertz metamaterials using three dimensional electric split-ring resonator arrays

We present the design, simulation, fabrication, and characterization of structurally reconfigurable metamaterials showing terahertz frequency tunability with a polarization-sensitivity. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The resonance frequency is observed to be either tunable or non-tunable with the electric field of the incident wave, which is perpendicular or parallel to the split gap of the electric split-ring resonators. This polarization-sensitive characteristic has been demonstrated by both the electromagnetic simulation and the experimental measurement. The observed polarization-sensitive tunability could be used for the development of polarization sensitive and insensitive THz polarimetric devices.

Three-dimensional movable metamaterial using electric split-ring resonators

We have demonstrated a three-dimensional movable metamaterial (MM) with reconfigurable electric split-ring resonators (eSRR) at terahertz frequencies. This is accomplished by making planar arrays of eSRR with movable stress curved beams (eSRR-MSCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-MSCBs possess blueshifting capabilities and polarization dependent state at terahertz frequencies, while such adaptive MMs offer significant potential in realizing electromagnetic functionality with diversified applications, such as sensors, switches, and filters.

A 3-D movable THz filter using surface micromachining process

We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.

Development of tunable 3-D eSRR for THz applications

Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability has been demonstrated by both the electromagnetic simulation and the experimental measurement.

Tunable THz filter using 3-D split-ring resonators

An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.

Development of MEMS electric split-ring resonator arrays as tunable THz filters

Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented, which employ deformable microelectromechanical curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability can be applied in tunable metamaterial devices.

Nanoplasmonic optical filter based on complementary split-ring resonator

A novel nanoplasmonic optical filter is presented, in which the non-integer modes can be excited as well as the integer modes. The transmission-spectra can be efficiently modified by manipulate the nano-wall inside the MIM ring.

A three-dimensional THz metamaterials using double split-ring resonators

A new actuation mechanism for a three-dimensional metamaterials is demonstrated. This reconfigurable three-dimensional metamaterials was constructed by double split-ring resonators. The achieved tuning range is 0.5 THz, while quality factor is improved as well.