G. Schürmann

Sensing protein molecules using nanofabricated pores

We report the detection of protein molecules with nanofabricated pores using the resistive pulse sensing method. A 20-nm-thick silicon nitride membrane with a nanofabricated pore measuring about 55nm in diameter separated an electrolyte cell into two compartments. Current spike trains were observed when bovine serum albumin (BSA) was added to the negatively biased compartment. The magnitude of the spikes corresponded to particles 7–9nm in diameter (the size of a BSA molecule) passing through the pore. This suggests that the current spikes were current blockages caused by single BSA molecules. The presented nano-Coulter counting method could be applied to detect single protein molecules in free solution, and to study the translocation of proteins through a pore.

Label-Free Detection of Single Protein Molecules and Protein-Protein Interactions Using Synthetic Nanopores

Nanofabricated pores in 20 nm-thick silicon nitride membranes were used to probe various protein analytes as well as to perform an antigen-antibody binding assay. A two-compartment electrochemical cell was separated by a single nanopore, 28 nm in diameter. Adding proteins to one compartment caused current perturbations in the ion current flowing through the pore. These perturbations correlated with both the charge and the size of the protein or of a protein-protein complex. The potential of this nanotechnology for studying protein-protein interactions is highlighted with the sensitive detection of beta-human chorionic gonadotropin, a hormone and clinical biomarker of pregnancy, by monitoring in real time and at a molecular level the formation of a complex between hormones and antibodies in solution. In this form, the assay compared advantageously to immunoassays, with the important difference that labels, immobilization, or amplification steps were no longer needed. In conclusion, we present proof-of-principle that properties of proteins and their interactions can be investigated in solution using synthetic nanopores and that these interactions can be exploited to measure protein concentrations accurately.

Patterned growth of single-walled carbon nanotube arrays from a vapor-deposited Fe catalyst

Single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst. Ordered arrays of suspended nanotubes ranging from submicron to several micron lengths have been obtained on Si, SiO 2 , Al 2 O 3 , and Si 3 N 4 substrates that were patterned on hundred nanometer length scales with a focused ion beam machine. Electric fields applied during nanotube growth allow the control of growth direction. Nanotube circuits have been constructed directly on contacting metal electrodes of Pt/Cr patterned with catalysts. Patterning with solid iron catalyst is compatible with modern semiconductor fabrication strategies and may contribute to the integration of nanotubes in complex device architectures.

Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes

High-resolution near-field optical imaging with microfabricated probes is demonstrated. The probes are made from solid quartz tips fabricated at the end of silicon cantilevers and covered with a 60-nm-thick aluminum film. Transmission electron micrographs indicate a continuous aluminum layer at the tip apex. A specially designed instrument combines the advantages of near-field optical and beam-deflection force microscopy. Near-field optical data of latex bead projection patterns in transmission and of single fluorophores have been obtained in constant-height imaging mode. An artifact-free optical resolution of 31.7±3.6 nm has been deduced from full width at half maximum values of single molecule images.

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

Abstract We have developed a new process to fabricate arrays of cantilevers with integrated tips for atomic force microscope (AFM) imaging and a piezoelectric layer for vertical actuation and detection. A good homogeneity of the tip shape is obtained thanks to a self-sharpening effect. The cantilevers have been characterized mechanically and electrically.

Atomic Force Microscopy Using Cantilevers with Integrated Tips and Piezoelectric Layers for Actuation and Detection

Cantilevers with integrated tip and piezoelectric layer (zinc oxide, ZnO) for actuation and detection have been microfabricated using monocrystalline silicon as the bulk material. Arrays of five levers and cantilevers with two independent ZnO layers have also been obtained. The levers have been mechanically and electrically characterized. Dynamic mode and contact mode atomic force microscopy (AFM) images were achieved using the integrated piezoelectric layer of these levers as a vertical deflection sensor.

Micromachined SPM probes with sub-100 nm features at tip apex

Note: 204 Reference SAMLAB-ARTICLE-1999-020doi:10.1002/(SICI)1096-9918(199905/06)27:5/6 3.0.CO;2-V Record created on 2009-05-12, modified on 2016-08-08

Microfabrication of a combined AFM-SNOM sensor

The objective of this work is to fabricate a scanning probe sensor that combines the well-established method for atomic force microscopy, employing a micro-machined Si cantilever and integrated tip, with a probe for the optical near field. A photosensitive pn-junction is integrated into the tip for that purpose and an Al coating is applied to the tip. It comprises an aperture of 50-70 nm in diameter at the apex of the tip in order to spatially limit the interaction of the tip to the optical near field of the sample. Characterization of the tip and first results of simultaneously recorded force and photon images are presented.

Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy

Arrays of cantilevers with integrated self-sharpening tips and self-exciting piezoelectric sensors have been fabricated using monocrystalline silicon micromachining. During the fabrication process, tips are first formed with a wet etching technique allowing a good homogeneity of tip shape over a whole wafer and then protected with a local thick silicon dioxide layer. Single cantilevers have been used to achieve atomic force microscopy images of grids with periods of 0.25, 1, and 5 μm and with height differences of 100, 15, and 180 nm, respectively.

Tunable nanometer electrode gaps by MeV ion irradiation

We report the use of MeV ion-irradiation-induced plastic deformation of amorphous materials to fabricate electrodes with nanometer-sized gaps. Plastic deformation of the amorphous metal Pd(80)Si(20) is induced by 4.64 MeV O(2+) ion irradiation, allowing the complete closing of a sub-micrometer gap. We measure the evolving gap size in situ by monitoring the field emission current-voltage (I-V) characteristics between electrodes. The I-V behavior is consistent with Fowler-Nordheim tunneling. We show that using feedback control on this signal permits gap size fabrication with atomic-scale precision. We expect this approach to nanogap fabrication will enable the practical realization of single molecule controlled devices and sensors.