Gabor Paal

Method of making a negative photoresist image

Method of developing and stripping positive photoresist

Method of depositing thin films of small dimensions utilizing silicon nitride lift-off mask

Method of passivating and planarizing a metallization pattern

Process for the deposition of a thin-film pattern on a substrate

Verfahren zum Aufbringen eines Dünnfilmmusters auf ein Substrat

Verfahren zur passivierung und planarisierung eines metallisierungsmusters Process for passivation and planarization of a metallization pattern

Method for obtaining negative photoresist image

Process for the passivation and planarization of a metalized

Dissolving baked novolak resin based photoresist with aqueous solution of permanganate and phosphoric acid