Gabriele Cazzaniga

Micro rate of rotation sensor and method for operating a micro rate of rotation sensor

ELECTRO-MECHANICAL RESONANCE LOOP

MICROELECTROMECHANICAL Z-AXIS OUT-OF-PLANE STOPPER

Micro-Electromechanical Structure with Low Sensitivity to Thermo-Mechanical Stress

Microelectromechanical structure for out-of-plane acceleration sensor, has substrate, testing mass suspended over substrate and armature fastened on substrate, where testing mass reacts to acceleration

Rückstellsystem und Verfahren für MEMS-Bauelemente

Recovery system and methods for MEMS devices

Innovative angular sensor read-out multi-axes digital front-end chain

MEMS PRESSURE SENSOR WITH IMPROVED INSENSITIVITY TO THERMO-MECHANICAL STRESS

Controller for controlling sensor with oscillatory mass used for measuring angular speed of moving object, has signal processing chain activated and operated by sensor signal, where digitized sensor signal is extracted from sensor signal