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Ge Zhong

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Publication

Featured researches published by Ge Zhong.

Archive | 2013

Method and device for detecting purity of trichlorosilane

Feng Quanlin; He Ziqiang; Yan Zhirui; Ku Liming; Suo Sizhuo; Ge Zhong; Chang Qing

Archive | 2013

Method and device for rapidly drying cleaned silicon wafers

Chen Haibin; Feng Quanlin; Ge Zhong; Ku Liming; Sheng Fangyu; Suo Sizhuo; Yan Zhirui

Archive | 2014

Finishing process of polishing cloth for double-sided polishing

Ku Liming; Yan Zhirui; Suo Sizhuo; Wang Yongtao; Ge Zhong; Ye Songfang; Lu Jinjun

Archive | 2013

Disk trimming device for trimming large disk of double-surface polishing machine

Ku Liming; Yan Zhirui; Suo Sizhuo; Wang Yongtao; Ge Zhong; Ye Songfang; Lu Jinjun

Archive | 2017

Method for testing metal content in silicon chip box

Li Zongfeng; Zhao Erjing; Feng Quanlin; Li Qingbao; Sheng Fangyu; Wang Yongtao; Ge Zhong; Ku Liming; Zhang Jian; Lu Jinjun

Archive | 2017

Method for bonding polishing pad in chemical and mechanical polishing process

Wang Yongtao; Ku Liming; Ge Zhong; Yan Zhirui

Archive | 2017

Loose pulley sheet used for machining silicon rings and machining method

Ku Liming; Zhu Qinfa; Wang Yongtao; Ge Zhong; Yan Zhirui

Archive | 2017

Method for polishing ultrathin silicon ring

Wang Yongtao; Ge Zhong; Ku Liming; Zhu Qinfa; Yan Zhirui; Li Lei

Archive | 2017

Vacuum suction cup device and method for fixing and uninstalling machined parts

Ge Zhong; Ku Liming; Wang Yongtao; Zhu Qinfa; Yan Zhirui; Li Lei

Archive | 2017

Silicon wafer bearing part and method for reducing metal content of high-temperature-annealed silicon wafer body

Li Zongfeng; Feng Quanlin; Zhao Erjing; Sheng Fangyu; Wang Yongtao; Ge Zhong; Ku Liming; Wang Lei; Liu Jiantao

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Collaboration

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Wang Lei

Sun Yat-sen University

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Zhang Jian

Sinopec

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