Georg Rossbach

Blue monolithic AlInN-based vertical cavity surface emitting laser diode on free-standing GaN substrate

We report on III-nitride based blue vertical cavity surface emitting lasers using defect-free highly reflective AlInN/GaN distributed Bragg reflectors grown on c-plane free-standing GaN substrates. Lasing is demonstrated at room temperature under pulsed electrical injection. The high lasing threshold current density still prevents devices from continuous wave lasing because of large self-heating. The reasons for such a high threshold are discussed and we show that it mainly comes from large light absorption in the indium tin oxide current spreading layer. Properly tuning both its thickness and its position with respect to the electrical field could remarkably decrease the threshold.

High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate

We report on the achievement of freestanding GaN photonic crystal L7 nanocavities with embedded InGaN/GaN quantum wells grown by metal organic vapor phase epitaxy on Si (111). GaN was patterned by e-beam lithography, using a SiO2 layer as a hard mask, and usual dry etching techniques. The membrane was released by underetching the Si (111) substrate. Micro-photoluminescence measurements performed at low temperature exhibit a quality factor as high as 5200 at ∼420 nm, a value suitable to expand cavity quantum electrodynamics to the near UV and the visible range and to develop nanophotonic platforms for biofluorescence spectroscopy.

Dielectric function and optical properties of Al-rich AlInN alloys pseudomorphically grown on GaN

A detailed discussion of the optical properties of Al-rich Al1−xInxN alloy films is presented. The (0 0 0 1)-oriented layers with In contents between x = 0.143 and x = 0.242 were grown by metal-organic vapour phase epitaxy on thick GaN buffers. Sapphire or Si(1 1 1) served as the substrate. High-resolution x-ray diffraction revealed pseudomorphic growth of the nearly lattice-matched alloys; the data analysis yielded the composition as well as the in-plain strain. The complex dielectric function (DF) between 1 and 10 eV was determined from spectroscopic ellipsometry measurements. The sharp onset of the imaginary part of the DF defines the direct absorption edge, while clearly visible features in the high-photon energy range of the DF, attributed to critical points (CPs) of the band structure, indicate promising crystalline quality of the AlInN layers. It is demonstrated that the experimental data can be well reproduced by an analytical DF model. The extracted characteristic transition energies are used to determine the bowing parameters for all CPs of the band structure. In particular, strain and the high exciton binding energies for the Al-rich alloys are taken into account in order to assess the splitting between the valence band with symmetry and the conduction band at the centre of the Brillouin zone. Finally, the compositional dependence of the high-frequency dielectric constants is reported.

Dielectric function of zinc-blende AlN from 1 to 20 eV: Band gap and van Hove singularities

The dielectric function (DF) of phase-pure cubic AlN films is determined by ellipsometry. The sharp onset of the imaginary part of the DF defines the direct absorption edge corresponding to a conduction-to-valence band spacing at the center of the Brillouin zone (BZ) of 5.93 eV. Phonon-assisted transitions lead to the pronounced absorption tail below this edge from which the indirect gap of zinc-blende AlN is estimated with 5.3 eV. Transitions due to four additional critical points of the BZ are resolved at higher photon energies. The high-frequency and static dielectric constants are determined with 4.25 and 8.07, respectively.

Q-factor of (In,Ga)N containing III-nitride microcavity grown by multiple deposition techniques

A 3λ/2 (In,Ga)N/GaN resonant cavity, designed for ∼415 nm operation, is grown by molecular beam epitaxy and is sandwiched between a 39.5-period (In,Al)N/GaN distributed Bragg reflector (DBR), grown on c-plane GaN-on-sapphire pseudo-substrate by metal-organic vapor phase epitaxy and an 8-period SiO2/ZrO2 DBR, deposited by electron beam evaporation. Optical characterization reveals an improvement in the cavity emission spectral purity of approximately one order of magnitude due to resonance effects. The combination of spectrophotometric and micro-reflectivity measurements confirms the strong quality (Q)-factor dependence on the excitation spot size. We derive simple analytical formulas to estimate leak and residual absorption losses and propose a simple approach to model the Q-factor and to give a quantitative estimation of the weight of cavity disorder. The model is in good agreement with both transfer-matrix simulation and the experimental findings. We point out that the realization of high Q-factor (In,G...

TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

© 2015 American Vacuum Society. In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO 2 , with SiO 2 as a sacrificial layer. The TiO 2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.

InGaN/GaN quantum wells for polariton laser diodes: Role of inhomogeneous broadening

Contrary to the case of III-nitride based visible light-emitting diodes for which the inhomogeneous linewidth broadening characteristic of InGaN-based multiple quantum well (MQW) heterostructures does not appear as a detrimental parameter, such a broadening issue can prevent a microcavity (MC) system entering into the strong light-matter coupling regime (SCR). The impact of excitonic disorder in low indium content (x ∼ 0.1) InxGa1–xN/GaN MQW active regions is therefore investigated for the subsequent realization of polariton laser diodes by considering both simulations and optical characterizations. It allows deriving the requirements for such MQWs in terms of absorption, emission linewidth, and Stokes shift. Systematic absorption-like and photoluminescence (PL) spectroscopy experiments are performed on single and multiple In0.1Ga0.9N/GaN quantum wells (QWs). Micro-PL mappings reveal a low temperature PL linewidth of ∼30 meV, compatible with SCR requirements, for single QWs for which the microscopic origi...

Biexcitonic molecules survive excitons at the Mott transition

When the carrier density is increased in a semiconductor, according to the predictions of Sir Nevil Mott, a transition should occur from an insulating state consisting of a gas of excitons to a conductive electron-hole plasma. This crossover, usually referred to as the Mott transition, is driven by the mutual effects of phase-space filling and Coulomb screening because of the presence of other charges nearby. It drastically affects the optical and electrical characteristics of semiconductors and may, for example, drive the transition from a polariton laser to a vertical cavity surface-emitting laser. Usually, the possible existence of excitonic molecules (or biexcitons) is neglected in the understanding of the Mott transition because the biexciton is supposed to be less robust against screening effects. Here, against common beliefs, we observe that the biexciton in a GaN quantum well is more stable towards the Mott transition than the exciton.

Optical absorption edge broadening in thick InGaN layers: Random alloy atomic disorder and growth mode induced fluctuations

To assess the impact of random alloying on the optical properties of the InGaN alloy, high-quality InxGa1−xN (0 < x < 0.18) epilayers grown on c-plane free-standing GaN substrates are characterized both structurally and optically. The thickness (25–100 nm) was adjusted to keep these layers pseudomorphically strained over the whole range of explored indium content as checked by x-ray diffraction measurements. The evolution of the low temperature optical absorption (OA) edge linewidth as a function of absorption energy, and hence the indium content, is analyzed in the framework of the random alloy model. The latter shows that the OA edge linewidth should not markedly increase above an indium content of 4%, varying from 17 meV to 30 meV for 20% indium. The experimental data initially follow the same trend with, however, a deviation from this model for indium contents exceeding only ∼2%. Complementary room temperature near-field photoluminescence measurements carried out using a scanning near-field optical mi...

Air-suspended TiO2-based HCG reflectors for visible spectral range

For GaN-based microcavity light emitters, such as vertical-cavity surface-emitting lasers (VCSELs) and resonant cavity light emitting diodes (RCLEDs) in the blue-green wavelength regime, achieving a high reflectivity wide bandwidth feedback mirror is truly challenging. The material properties of the III-nitride alloys are hardly compatible with the conventional distributed Bragg reflectors (DBRs) and the newly proposed high-contrast gratings (HCGs). Alternatively, at least for the top outcoupling mirror, dielectric materials offer more suitable material combinations not only for the DBRs but also for the HCGs. HCGs may offer advantages such as transverse mode and polarization control, a broader reflectivity spectrum than epitaxially grown DBRs, and the possibility to set the resonance wavelength after epitaxial growth by the grating parameters. In this work we have realized an air-suspended TiO2 grating with the help of a SiO2 sacrificial layer. The deposition processes for the dielectric layers were fine-tuned to minimize the residual stress. To achieve an accurate control of the grating duty cycle, a newly developed lift-off process, using hydrogen silesquioxan (HSQ) and sacrificial polymethyl-methacrylate (PMMA) resists, was applied to deposit the hard mask, providing sub-10 nm resolution. The finally obtained TiO2/air HCGs were characterized in a micro-reflectance measurement setup. A peak power reflectivity in excess of 95% was achieved for TM polarization at the center wavelength of 435 nm, with a reflectivity stopband width of about 80 nm (FWHM). The measured HCG reflectance spectra were compared to corresponding simulations obtained from rigorous coupled-wave analysis and very good agreement was found.