Gerd Passing
Bayer
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Publication
Featured researches published by Gerd Passing.
MRS Proceedings | 2002
Valentina Terzieva; Bram Sijmus; Marc Meuris; Lothar Puppe; Gerd Passing
In this work novel slurries both for copper and tantalum nitride removal were developed. In the first step the Cu bulk is removed, by using high selective slurry, which stops on the underlying TaN barrier. The selectivity of Cu vs. TaN achieved with this slurry is larger than 1/100. High selective second step slurry is further introduced for removing the barrier material. In the present work data concerning dishing and erosion will be presented as a function of line width and pattern density across the wafer. Electrical yield measurements on shorts and opens of meander-fork structures will be discussed.
Advanced Materials | 1991
Ralf Riedel; Joachim Bill; Gerd Passing
Archive | 2000
Hermann-Jens Womelsdorf; Werner Hoheisel; Gerd Passing
Archive | 2002
Lothar Puppe; Gerd Passing; Ming-Shih Tsai
Archive | 1999
Hermann Jens Womelsdorf; Werner Hoheisel; Gerd Passing
Archive | 2002
Hermann Jens Womelsdorf; Gerd Passing; Volker Wege; Joachim Wagner; Bernd Hynek; Lothar Reif
Archive | 1998
Gerd Passing; Michael Mager; Stephan Kirchmeyer; Markus Mechtel
Chemical Vapor Deposition | 2009
Tobias Thiede; Harish Parala; Knud Reuter; Gerd Passing; Stephan Kirchmeyer; Jörn Hinz; Martin Lemberger; Anton J. Bauer; Davide Barreca; Alberto Gasparotto; Roland A. Fischer
Archive | 2001
Kristina Vogt; Gerd Passing; Ming-Shih Tsai
Archive | 2006
Knud Reuter; Gerd Passing; Younsoo Kim; Harish Parala; Roland A. Fischer
