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Dive into the research topics where Goebel Herbert is active.

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Featured researches published by Goebel Herbert.


Archive | 2001

Substrate carrier used to holding thin layer substrates during the manufacture of high pressure sensor elements comprises a base element for receiving the substrate arranged on a handling element having covering elements

Weiblen Kurt; Goebel Herbert; Wanka Harald; Kretschmann Andre; Henn Ralf; Wingsch Volker; Glueck Joachim; Scharping Armin


Archive | 2004

Semiconductor diode and method for producing the same

Goebel Herbert; Goebel Vesna


Archive | 2006

VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERDIODE

Goebel Herbert; Goebel Vesna


Archive | 2002

METHOD FOR PRODUCING A SEMICONDUCTOR DIODE

Goebel Herbert; Goebel Vesna


Archive | 2002

Semiconductor arrangement used as a diode consists of a chip with an edge region consisting of a first layer of first conductivity and a second layer of opposing conductivity made up of partial layers

Goebel Herbert; Goebel Vesna


Archive | 2002

Process for producing semiconductor device

Goebel Herbert; Goebel Vesna


Archive | 2002

Herstellungsverfahren für ein Dünnschicht-Bauelement, insbesondere einen Dünnschicht-Hochdrucksensor, und Dünnschichtbauelement

Goebel Herbert; Wanka Harald; Kretschmann Andre; Henn Ralf; Glueck Joachim; Muenzel Horst


Archive | 2001

Verfahren zur Herstellung definierter polykristalliner Silizium-Bereiche in einer amorphen Siliziumschicht

Emili Walter; Goebel Herbert; Wanka Harald


Archive | 2000

Sensor, especially a mass flow sensor, has a membrane with thick stripe-like ribs for increasing membrane stability

Goebel Herbert; Kampshoff Christoph


Archive | 1999

Planarer Abgleichwiderstand, Anwendungen und Verfahren zu seiner Herstellung

Emili Walter; Goebel Herbert; Wanka Harald

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