Gordon R. Lambertus

High-performance temperature-programmed microfabricated gas chromatography columns

This paper reports the first development of high-performance, silicon-glass micro-gas chromatography (/spl mu/GC) columns having integrated heaters and temperature sensors for temperature programming, and integrated pressure sensors for flow control. These 3-m long, 150-/spl mu/m wide and 250-/spl mu/m deep columns, integrated on a 3.3 cm square die, were fabricated using a silicon-on-glass dissolved wafer process. Demonstrating the contributions to heat dissipation from conduction, convection, and radiation with and without packaging, it is shown that using a 7.5-mm high atmospheric pressure package reduces power consumption to about 650 mW at 100/spl deg/C, while vacuum packaging reduces the steady-state power requirements to less than 100 mW. Under vacuum conditions, 600 mW is needed for a temperature-programming rate of 40/spl deg/C/min. The 2300 ppm//spl deg/C TCR of the temperature sensors and the 50 fF/kPa sensitivity of the pressure sensors satisfy the requirements needed to achieve reproducible separations in a /spl mu/GC system. Using these columns, highly resolved 20-component separations were obtained with analysis times that are a factor of two faster than isothermal responses.

High-Speed MEMS-Based Gas Chromatography

This paper reports microfabricated silicon-glass separation columns for high-speed micro gas chromatography (muGC) systems. The microfabricated columns are integrated with resistive heaters and temperatures sensors and capacitive pressure sensors to allow temperature and pressure programming and flow control and to achieve reproducible separations in a muGC system. These 25-cm-long, 150-mum-wide, and 250-mum-deep columns are fabricated on a 1.2-cm square die using a silicon-on-glass dissolved wafer process. Programmed with temperature ramps of 10 degC/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10 s, including alkanes from C5 to C16 and simulants for C-4, TNT, sarin, and mustard gas. When used in arrayed architectures, these MEMS columns should allow high-speed analysis without sacrificing separation efficiency

A Low-Power Pressure- and Temperature-Programmable Micro Gas Chromatography Column

This paper presents the theory, fabrication, and experimental results for a high-performance low-power micro gas chromatography column. The suspended-dielectric 1-m-long column is split into two sections, permitting independent pressure and temperature programming. Integrated column heaters have a mean resistance of 16.8 kOmega and a temperature coefficient of resistance of 431 ppm/degC. The suspended column requires 11 mW to raise its temperature by 100degC in vacuum (1 mtorr). The column separates ten volatile organic compounds in 52 s and four chemical warfare agent simulants and an explosive simulant in 60 s.

An Integrated Micro-Analytical System for Complex Vapor Mixtures

A micro gas chromatograph (muGC) capable of quantitatively analyzing the components of complex vapor mixtures at trace concentrations is described. The muGC features a micro- preconcentrator/focuser (muPCF), dual-column pressure- and temperature-programmed separation module, and an integrated array of nanoparticle-coated chemiresistors. The latest design modifications and performance data are presented. Highlights include a 4-min separation of a 30-component mixture with a 3-m DRIE Si/glass microcolumn, a 14-sec separation of an 11-component mixture on a 25-cm microcolumn, a complete multi-vapor analysis from a hybrid microsystem that combines analytical, rf- wireless, and microcontroller modules, and a rapid analysis driven by a 4-stage peristaltic micropump.

A Micropump-Driven High-Speed MEMS Gas Chromatography System

We report (1) the integration of the first functioning MEMS gas chromatography system ( muGC) featuring a micropump, a micro-column, and a micro-chemiresistor sensor array; and (2) experimental demonstration of the state-of-the-art multi-vapor gas separation and detection. In particular, we report the best GC analysis data from the first micropump-driven muGC system to date: the separation and detection of 11 volatile organic compounds (VOC)s within only 78 seconds while consuming only 15.1 mW of power within a small volume of 0.5 cc. We also report the use of temperature programming (TP) of the separation column for fast analysis, which shortened the analysis time from 78 seconds to 24 seconds while maintaining gas analysis resolution.

High-speed MEMS-based gas chromatography

This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10/spl deg/C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.

A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.

This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure- and temperature-programmed micro gas chromatograph ({micro}GC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long silicon-glass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100 C and has a response time of 11s and natural temperature ramp rate of 580 C/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns.