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Gregory M. Wilson

SunEdison

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Publication

Featured researches published by Gregory M. Wilson.

Archive | 2000

Semiconductor Wafer Manufacturing Process

Michael J. Ries; Gregory M. Wilson; Robert W. Standley; Larry W. Shive; Jon A. Rossi

Archive | 2002

Thermal annealing process for producing silicon wafers with improved surface characteristics

Jiri L. Vasat; Andrei Stefanescu; Thomas A. Torack; Gregory M. Wilson

Archive | 2001

Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof

Gregory M. Wilson; Jon A. Rossi; Charles Chiun-Chieh Yang

Archive | 1999

Epitaxial silicon wafer with intrinsic gettering

Gregory M. Wilson; Jon A. Rossi; Charles Chiun-Chieh Yang

Archive | 1998

In situ wafer cleaning process

Gregory M. Wilson; Charles R. Lottes

Archive | 2000

Pressure equalization system for chemical vapor deposition reactors

Gregory M. Wilson; Michael J. Ries; Thomas A. Torack

Archive | 2004

Method and apparatus for forming a silicon wafer with a denuded zone

Gregory M. Wilson; Michael J. Ries

Archive | 2001

High throughput epitaxial growth by chemical vapor deposition

Srikanth Kommu; Gregory M. Wilson

Archive | 1998

Process and apparatus for preparation of epitaxial silicon layers free of grown-in defects

Gregory M. Wilson; Michael J. Ries; Lu Fei; David J. Ruprecht; Lance G. Hellwig

Archive | 2009

METHOD FOR PROCESSING A SILICON-ON-INSULATOR STRUCTURE

Michael J. Ries; Robert W. Standley; Jeffrey L. Libbert; Andrew M. Jones; Gregory M. Wilson

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