Gregory T. A. Kovacs

Bulk micromachining of silicon

Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surface-micromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dry etching methods compatible with complementary metal-oxide-semiconductors, it is unlikely that bulk micromachining will decrease in popularity in the near future. The available etching methods fall into three categories in terms of the state of the etchant: wet, vapor, and plasma. For each category, the available processes are reviewed and compared in terms of etch results, cost, complexity, process compatibility, and a number of other factors. In addition, several example micromachined structures are presented.

Range correlation and I/Q performance benefits in single-chip silicon Doppler radars for noncontact cardiopulmonary monitoring

Direct-conversion microwave Doppler-radar transceivers have been fully integrated in 0.25-/spl mu/m silicon CMOS and BiCMOS technologies. These chips, operating at 1.6 and 2.4 GHz, have detected movement due to heartbeat and respiration 50 cm from the subject, which may be useful in infant and adult apnea monitoring. The range-correlation effect on residual phase noise is a critical factor when detecting small phase fluctuations with a high-phase-noise on-chip oscillator. Phase-noise reduction due to range correlation was experimentally evaluated, and the measured residual phase noise was within 5 dB of predicted values on average. In a direct-conversion receiver, the phase relationship between the received signal and the local oscillator has a significant effect on the demodulation sensitivity, and the null points can be avoided with a quadrature (I/Q) receiver. In this paper, measurements that highlight the performance benefits of an I/Q receiver are presented. While the accuracy of the heart rate measured with the single-channel chip ranges from 40% to 100%, depending on positioning, the quadrature chip accuracy is always better than 80%.

Retinal ganglion cells do not extend axons by default: promotion by neurotrophic signaling and electrical activity.

We investigate the signaling mechanisms that induce retinal ganglion cell (RGC) axon elongation by asking whether surviving neurons extend axons by default. We show that bcl-2 overexpression is sufficient to keep purified RGCs alive in the absence of any glial or trophic support. The bcl-2-expressing RGCs do not extend axons or dendrites unless signaled to do so by single peptide trophic factors. Axon growth stimulated by peptide trophic factors is remarkably slow but is profoundly potentiated by physiological levels of electrical activity spontaneously generated within embryonic explants or mimicked on a multielectrode silicon chip. These findings demonstrate that these surviving neurons do not constitutively extend axons and provide insight into the signals that may be necessary to promote CNS regeneration.

Robust Neural-Network-Based Classification of Premature Ventricular Contractions Using Wavelet Transform and Timing Interval Features

Automatic electrocardiogram (ECG) beat classification is essential to timely diagnosis of dangerous heart conditions. Specifically, accurate detection of premature ventricular contractions (PVCs) is imperative to prepare for the possible onset of life-threatening arrhythmias. Although many groups have developed highly accurate algorithms for detecting PVC beats, results have generally been limited to relatively small data sets. Additionally, many of the highest classification accuracies (>90%) have been achieved in experiments where training and testing sets overlapped significantly. Expanding the overall data set greatly reduces overall accuracy due to significant variation in ECG morphology among different patients. As a result, we believe that morphological information must be coupled with timing information, which is more constant among patients, in order to achieve high classification accuracy for larger data sets. With this approach, we combined wavelet-transformed ECG waves with timing information as our feature set for classification. We used select waveforms of 18 files of the MIT/BIH arrhythmia database, which provides an annotated collection of normal and arrhythmic beats, for training our neural-network classifier. We then tested the classifier on these 18 training files as well as 22 other files from the database. The accuracy was 95.16% over 93,281 beats from all 40 files, and 96.82% over the 22 files outside the training set in differentiating normal, PVC, and other beats

A traction stress sensor array for use in high-resolution robotic tactile imaging

A high resolution large-area array capable of resolving the three independent components of a 2D triaxial contact stress profile has been developed. The array, composed of 4096 (64/spl times/64) individual stress sensing elements, was constructed with a fully CMOS-compatible fabrication process, allowing integration of the sensing structures with digital control circuitry. The individual array elements have been shown to demonstrate linear responses to both applied normal stress (1.59 mV/kPa, 0-35 kPa) and applied shear stress (0.32 mV/kPa, 0-60 kPa). A spatial resolution comparable to the spacing of the papillary ridges of the human dermis (/spl ap/300 /spl mu/m) has been achieved within the 1.92/spl times/1.92 cm active sensing area of the array. Descriptions of the sensor structure, the required signal conditioning, and the array architecture are presented in this paper. The results of electrical and mechanical characterization studies are also outlined.

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Abstract New developments in deep reactive ion etching (DRIE) technology, when combined with silicon fusion bonding (SFB), make it possible, for the first time, to span nearly the entire range of microstructure thicknesses between surface and bulk micromachining, using only single-crystal silicon. The combination of these two powerful micromachining tools forms a versatile new technology for the fabrication of micromechanical devices. The two techniques are described and a process technology is presented. Some of the experimental structures and devices that have been demonstrated using this new process technology are discussed.

A multiparameter wearable physiologic monitoring system for space and terrestrial applications

A novel, unobtrusive and wearable, multiparameter ambulatory physiologic monitoring system for space and terrestrial applications, termed LifeGuard, is presented. The core element is a wearable monitor, the crew physiologic observation device (CPOD), that provides the capability to continuously record two standard electrocardiogram leads, respiration rate via impedance plethysmography, heart rate, hemoglobin oxygen saturation, ambient or body temperature, three axes of acceleration, and blood pressure. These parameters can be digitally recorded with high fidelity over a 9-h period with precise time stamps and user-defined event markers. Data can be continuously streamed to a base station using a built-in Bluetooth RF link or stored in 32 MB of on-board flash memory and downloaded to a personal computer using a serial port. The device is powered by two AAA batteries. The design, laboratory, and field testing of the wearable monitors are described.

Regeneration microelectrode array for peripheral nerve recording and stimulation

A microelectrode array capable of recording from and stimulating peripheral nerves at prolonged intervals after surgical implantation has been demonstrated. The microelectrode array, fabricated on a silicon substrate perforated by multiple holes (referred to as via holes), is implanted between the ends of a surgically severed nerve. Regenerating tissue fixes the device in place to provide a stable mapping between the microelectrodes and the axons in the nerve. Processes were developed for the fabrication of thin-film iridium microelectrodes, micromachined via holes, and silicon nitride passivation layers. All fabrication methods were designed to be compatible with standard CMOS/BiCMOS processes to allow for on-chip signal processing circuits in future designs. Such arrays, implanted in the peroneal nerves of rats, were used to record from and stimulate the nerves at up to 13 months postoperatively.<<ETX>>

Portable cell-based biosensor system using integrated CMOS cell-cartridges

The use of cell-based biosensors outside of the laboratory has been limited due to many issues including preparation of the sample, maintenance of the biological environment, and integration of the electronics for data collection and analysis. This paper describes a system that addresses several of these issues with the development of an integrated silicon-polydimethylsiloxane cell-cartridge. The cell-cartridge contains a CMOS silicon chip that incorporates a digital interface, temperature control system, microelectrode electrophysiology sensors, and analog signal buffering. Additionally, the cell-cartridge supports two separate cell populations in two 10 microl sealed chambers that have independent fluidic channels for sample injection. A portable, microcontroller-based electronics system capable of monitoring the action potential (AP) activity within the cell-cartridges was also developed. The AP activities of cardiomyocyte syncytia in the two chambers differentially responded to the flow of a control medium versus the flow of a biochemical agent. The cell-cartridges and portable electronics system were used to successfully record AP activity from cardiomyocytes outside of the laboratory under realistic application conditions.

Silicon-substrate microelectrode arrays for parallel recording of neural activity in peripheral and cranial nerves

A new process for the fabrication of regeneration microelectrode arrays for peripheral and cranial nerve applications is presented. This type of array is implanted between the severed ends of nerves, the axons of which regenerate through via holes in the silicon and are thereafter held fixed with respect to the microelectrodes. The process described is designed for compatibility with industry-standard CMOS or BiCMOS processes (it does not involve high-temperature process steps nor heavily-doped etch-stop layers), and provides a thin membrane for the via holes, surrounded by a thick silicon supporting rim. Many basic questions remain regarding the optimum via hole and microelectrode geometries in terms of both biological and electrical performance of the implants, and therefore passive versions were fabricated as tools for addressing these issues in on-going work. Versions of the devices were implanted in the rat peroneal nerve and in the frog auditory nerve. In both cases, regeneration was verified histologically and it was observed that the regenerated nerves had reorganized into microfascicles containing both myelinated and unmyelinated axons and corresponding to the grid pattern of the via holes. These microelectrode arrays were shown to allow the recording of action potential signals in both the peripheral and cranial nerve settings, from several microelectrodes in parallel.<<ETX>>