Guan-Guang Xia

Combination of glow-discharge and arc plasmas for CF4 abatement

Decomposition of CF4 by glow-discharge and arc plasmas was studied using a tubular quartz reactor, a disk type, and a T-type quartz reactor. The effects of different metal electrodes, input voltage, and reactor type on the efficiency of CF4 total destruction (DRE) were studied. The T-shape reactor was more efficient in CF4 destruction than either the disk or tubular type due to a combined effect of glow discharge and arc plasmas. Several hydrogen and oxygen sources, such as H2O, H2, O2, and CH4, were used to convert CF4. Using H2 and O2 as the hydrogen and oxygen sources presented better DRE than using H2O. The effect of different hydrogen and oxygen sources on the conversion of CF4 followed the trend: (H2 + O2) > (CH4 + O2) > H2O. The maximum DRE of 95% was observed with 0.5% CF4 using H2 and O2. A mass spectrometer and an emission spectroscope equipped with a charge-coupled detector (CCD) were used to characterize the products and intermediates. Mass spectrometric studies indicated that the reaction products were HF, CO2, and trace amounts of NO. N2 first negative and second positive emission lines were observed in the glow discharge plasmas as well as in the arc plasmas of N2. However, C and F intermediates were observed only in arc plasmas of CF4. Reactions occurring in the glow discharge plasmas and arcs seem to follow different mechanisms.

A novel Y-type reactor for selective excitation of atmospheric pressure glow discharge plasma

A novel Y-type atmospheric pressure ac glow discharge plasma reactor has been designed and tested in CO reduction with hydrogen and the reverse water–gas shift reaction. The reactor consists of a Y-type quartz tube with an angle of 120°–180° between the two long arms, two metal rod electrodes serving as high voltage terminals and two pieces of aluminum foil which were wrapped outside of the quartz tubes as a ground electrode. Different combinations of input power applied on this three- electrode system can lead to selective plasmas on one side, two sides, or can also generate a stable arc between the two high voltage terminal electrodes. The ability to selectively activate different species with this type of apparatus can help to minimize side reactions in plasmas to obtain desirable products. The Y-type reactor may provide a novel means to study fundamental problems regarding radical reactions.