Guangwu Duan

Voltage-tunable dual-layer terahertz metamaterials

This paper presents the design, fabrication, and characterization of a real-time voltage-tunable terahertz metamaterial based on microelectromechanical systems and broadside-coupled split-ring resonators. In our metamaterial, the magnetic and electric interactions between the coupled resonators are modulated by a comb-drive actuator, which provides continuous lateral shifting between the coupled resonators by up to 20 μm. For these strongly coupled split-ring resonators, both a symmetric mode and an anti-symmetric mode are observed. With increasing lateral shift, the electromagnetic interactions between the split-ring resonators weaken, resulting in frequency shifting of the resonant modes. Over the entire lateral shift range, the symmetric mode blueshifts by ~60 GHz, and the anti-symmetric mode redshifts by ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 74%; moreover, a 180° phase shift is achieved at 1.08 THz. Our tunable metamaterial device has myriad potential applications, including terahertz spatial light modulation, phase modulation, and chemical sensing. Furthermore, the scheme that we have implemented can be scaled to operate at other frequencies, thereby enabling a wide range of distinct applications.

A three-dimensional all-metal terahertz metamaterial perfect absorber

We present a three-dimensional terahertz metamaterial perfect absorber (MPA) that exhibits a high quality factor and is polarization insensitive. The unit cell is composed of two orthogonally oriented copper stand-up split ring resonators deposited on a copper ground plane with capacitive gaps in free space away from the substrate. Near unity (99.6%) absorption at ∼1.65 THz is experimentally obtained in excellent agreement with simulation results. The quality factor is ∼37, which is quite large for a terahertz MPA because of reduced material losses in the all-metal structure. According to simulation results, the MPA is insensitive to the polarization of the incident wave, and more than 90% absorption can be achieved for angles of incidence up to 60° for both TE and TM polarized incident THz waves.

Analysis of the thickness dependence of metamaterial absorbers at terahertz frequencies

Metamaterial absorbers typically consist of a metamaterial layer, a dielectric spacer layer, and a metallic ground plane. We have investigated the dependence of the metamaterial absorption maxima on the spacer layer thickness and the reflection coefficient of the metamaterial layer obtained in the absence of the ground plane layer. Specifically, we employ interference theory to obtain an analytical expression for the spacer thickness needed to maximize the absorption at a given frequency. The efficacy of this simple expression is experimentally verified at terahertz frequencies through detailed measurements of the absorption spectra of a series of metamaterials structures with different spacer thicknesses. Using an array of split-ring resonators (SRRs) as the metamaterial layer and SU8 as the spacer material we observe that the absorption peaks redshift as the spacer thickness is increased, in excellent agreement with our analysis. Our findings can be applied to guide metamaterial absorber designs and understand the absorption peak frequency shift of sensors based on metamaterial absorbers.

Electromechanically Tunable Metasurface Transmission Waveplate at Terahertz Frequencies

Dynamic polarization control of light is essential for numerous applications ranging from enhanced imaging to materials characterization and identification. We present a reconfigurable terahertz metasurface quarter-waveplate consisting of electromechanically actuated micro-cantilever arrays. Our anisotropic metasurface enables tunable polarization conversion cantilever actuation. Specifically, voltage-based actuation provides mode selective control of the resonance frequency, enabling real-time tuning of the polarization state of the transmitted light. The polarization tunable metasurface has been fabricated using surface micromachining and characterized using terahertz time domain spectroscopy. We observe a ~230 GHz cantilever actuated frequency shift of the resonance mode, sufficient to modulate the transmitted wave from pure circular polarization to linear polarization. Our CMOS-compatible tunable quarter-waveplate enriches the library of terahertz optical components, thereby facilitating practical applications of terahertz technologies.

Broadband extraordinary terahertz transmission through super-aligned carbon nanotubes film.

We experimentally demonstrate the extraordinary transmission of THz waves through super-aligned multi-walled carbon nanotube (MWCNT) films with one-dimensional arrays of sub-wavelength rectangular gratings in the broad frequency range from 0.2 to 2.5 THz. To achieve this, two kinds of MWCNT films (1 μm and 3 μm in thickness) were fabricated by drawing from a sidewall of super-aligned nanotube arrays synthesized by low pressure chemical vapor deposition. The measured complex refraction index of the film exhibits highly anisotropic transmission of THz waves through the MWCNTs. The anisotropy depends not only on the polarization direction of the THz waves but also on the orientation of the MWCNT gratings. We found that the resonantly extraordinary THz transmission originated from the surface plasmon polaritons supported by periodically patterned carbon nanotube gratings. Our experimental results may provide important insights for emerging THz plasmonic devices based on carbon nanotubes.

Microfluidic channel-based wireless charging and communication platform for microsensors with miniaturized onboard antenna

A double layer spiral antenna with side length of 380 μm was fabricated by a multi-step electroplating process, and integrated with a commercialized passive RFID chip to realize the RF power harvesting and communication functions of a microsensor. To power up and communicate with the microchips, a single layer spiral reader antenna was fabricated on top of a glass substrate with side length of 1 mm. The microchips and the reader antenna were both optimized at the frequency of 915 MHz. Due to the small size of the reader antenna, the strength of the magnetic field decreased dramatically along the axial direction of the reader antenna, which limited the working distance to within 1 mm. To enclose the microchips within the reading range, a three-layer microfluidic channel was designed and fabricated. The channel and cover layers were fabricated by laser cutting of acrylic sheets, and bonded with the glass substrate to form the channel. To operate multiple microchips simultaneously, separation and focusing function units were also designed. Low loss pump oil was used to transport the microchips flowing inside the channel. Within the reading area, the microchips were powered up, and their ID information was retrieved and displayed on the computer interface successfully.

An air-spacer terahertz metamaterial perfect absorber for sensing and detection applications

We designed, fabricated, and characterized a metamaterial perfect absorber at terahertz (THz) frequency range utilizing air as the dielectric material. Due to the avoidance of the loss usually introduced by the dielectric material, there was a three times improvement of the quality factor. Also, with metamaterials fabricated on a free-standing silicon nitride membrane, high sensitivity can be achieved compared with traditional metamaterials on thick substrate. Moreover, the absence of the dielectric materials presents the special opportunity to use liquid or gas as the dielectric layer for permittivity characterization or sensing and detection purposes

Terahertz Dispersion Characteristics of Super-aligned Multi-walled Carbon Nanotubes and Enhanced Transmission through Subwavelength Apertures

The terahertz (THz) dielectric properties of super-aligned multi-walled carbon nanotube (MWCNT) films were characterized in the frequency range from 0.1 to 2.5 THz with terahertz time-domain spectroscopy. The refractive index, effective permittivity, and conductivity were retrieved from the measured transmission spectra with THz incident wave polarized parallel and perpendicular to the orientation of carbon nanotubes (CNTs), and a high degree of polarization dependence was observed. The Drude-Lorentz model combined with Maxwell-Garnett effective medium theory was employed to explain the experimental results, revealing an obvious metallic behavior of the MWCNT films. Moreover, rectangular aperture arrays were patterned on the super-aligned MWCNT films with laser-machining techniques, and the transmission measurement demonstrated an extraordinarily enhanced transmission characteristic of the samples with incident wave polarized parallel to the orientation of the CNTs. Surface plasmon polaritons were employed to explain the extraordinarily enhanced transmission with high accuracy, and multi-order Fano profile was applied to model the transmission spectra. A high degree of agreement was exhibited among the experimental, numerical, and theoretical results.

Terahertz metamaterial perfect absorber with continuously tunable air spacer layer

We present a comprehensive investigation of a continuously tunable metamaterial perfect absorber operating at terahertz frequencies. In particular, we investigate a three-layer absorber structure consisting of a layer of split ring resonators and a metallic ground plane, with a central layer consisting of a mechanically tunable air-spaced layer. The absorber was characterized using terahertz time-domain spectroscopy in reflection (at normal incidence) as a function of spacer thickness from 0 to 1000 μm. Our experimental measurements reveal the detailed evolution of the absorption bands as a function of spacing, in excellent agreement with analysis using interference theory and simulation. Our Fabry-Perot-like structure provides an avenue for achieving massive tunability in metamaterial absorber devices.We present a comprehensive investigation of a continuously tunable metamaterial perfect absorber operating at terahertz frequencies. In particular, we investigate a three-layer absorber structure consisting of a layer of split ring resonators and a metallic ground plane, with a central layer consisting of a mechanically tunable air-spaced layer. The absorber was characterized using terahertz time-domain spectroscopy in reflection (at normal incidence) as a function of spacer thickness from 0 to 1000 μm. Our experimental measurements reveal the detailed evolution of the absorption bands as a function of spacing, in excellent agreement with analysis using interference theory and simulation. Our Fabry-Perot-like structure provides an avenue for achieving massive tunability in metamaterial absorber devices.

A Magnetically Coupled Communication and Charging Platform for Microsensors

A double layer spiral antenna with side length of