Guoyu Yu

Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: edges on processing the global surface

Segment-edges for extremely large telescopes are critical for observations requiring high contrast and SNR, e.g. detecting exo-planets. In parallel, industrial requirements for edge-control are emerging in several applications. This paper reports on a new approach, where edges are controlled throughout polishing of the entire surface of a part, which has been pre-machined to its final external dimensions. The method deploys compliant bonnets delivering influence functions of variable diameter, complemented by small pitch tools sized to accommodate aspheric mis-fit. We describe results on witness hexagons in preparation for full size prototype segments for the European Extremely Large Telescope, and comment on wider applications of the technology.

Misfit of rigid tools and interferometer subapertures on off-axis aspheric mirror segments

Rigid tools can confer advantages at certain stages of manufacturing off-axis mirror segments, but the misfit due to surface asphericity and asymmetry poses constraints on their application. Types of misfit are classified and, using least squares, the best-fit tool forms with different distances from the pole of the parent asphere are calculated. The outer mirror segment for the European extremely large telescope is taken as a case-study, assuming a rigid tool size of 150 mm. A simple independent approximation validates the calculation. A close parallel is wavefront misfit in subaperture interferometry, which is also considered.

Research on fabrication of mirror segments for E-ELT

The next generation ground-based giant telescope, the European Extremely Large Telescope (E-ELT), under development by the European Southern Observation (ESO) 1, will have nearly 1000 hexagonal segments of 1.45m across the flats. Fast processing of these segments with high form and edge specifications has proven to be a challenge. The Zeeko Precessions sub-aperture bonnet polishing plays an important role providing capability for polishing the surface and correcting the form to meet this target 2,3. BoXTM grinding has been adopted. This technology has the advantage of fast generating of aspheric surface with very low subsurface damage (SSD) 4. This will avoid the need of removing thick layer of stock at polishing stage to remove SSD. However the result grinding signatures has proven to be problematic for direct polishing with Zeeko’s standard bonnet technology. A novel ‘grolishing’ process which stands between ‘grinding’ and ‘polishing’ has been developed to deal with mid-spatial features left by BoXTM grinding. This tool is designed base on Zeeko’s R80 bonnet which will fits directly into the company’s IRP series machines. The process parameters have been optimised to have signatures less than 10 nm PV. The edge profile is 1μm upstand within 40 mm edge zone. The ‘grolished’ surface can be directly pre-polished together with all the form corrections. To meet the fabrication time target, R160 bonnet is used with 50 mm polishing spot, this will provide removal rate of 9.8 mm3/minute, which can be employed at pre-polishing stage and some form correction. Process parameters have been developed to leave slow upstand at edge zone without any form of sharp edge downturn. The following form correction stage, which employs smaller polishing spot of about 20 mm diameter, will continue to remove form errors of spatial frequency between 0.02 – 0.05 1/mm. Furthermore, the upstand edge will be, to a large part, removed at this stage. It is demonstrated that the form specs can be achieved after this process. The following smoothing process will improve surface textures and remove edge errors. Local edge rectification is normally necessary to bring the edge at same level. A final smoothing process will bring the bulk area and edge zone to meet all the specifications.

Research on edge-control methods in CNC polishing

BackgroundWe have developed edge-control for the Precessions TM process suitable for fast fabrication of large mirror segments, and other applications sensitive to edge mis-figure. This has been applied to processing of European extremely large telescope (E-ELT) prototype mirror-segments, meeting the specification on maximum edge mis-figure. However we have observed residuals that have proved impossible to correct with this approach, being in part the legacy of asymmetries in the input edge-profiles.MethodsWe have therefore compared different proposed methods experimentally and theoretically and report here on a new edge-rectification step, which operates locally on edges, does not disturb the completed bulk area.ResultsA new toolpath has been developed and experiments have been carried out to demonstrate that local edge rectification can be carried out.ConclusionsWith this method, the residue error on edges can be removed separately and has potential to reduce total process time.

Insight into aspheric misfit with hard tools: mapping the island of low mid-spatial frequencies

This paper addresses computer numerical control (CNC) polishing of aspheric or freeform optics. Prior CNC grinding of the asphere tends to produce mid-spatial frequencies (MSFs) at some level. Precessions polishing can rectify these, but the very ability of the bonnet tooling to adapt to the local asphere enables it to do so, at least in part, to similar spatial frequencies in the MSFs. To accelerate smoothing, hard tools can, in principle, be used, but aspheric misfit is often assumed to preclude this. In this paper, we explore new insight into the role of abrasive particle size in accommodating misfit. First, we report on a glass-bending rig to produce a continuous range of complex surfaces, while withstanding process forces. Then, we describe how this was used to evaluate the triangle of misfit, abrasive size, and MSFs produced for hard rotating tools. This has revealed a regime in which such tools can be used without introducing significant new MSFs, as evidenced by manufacture of prototype off-axis aspheric segments for the European Extremely Large Telescope project.

The role of robotics in computer controlled polishing of large and small optics

Following formal acceptance by ESO of three 1.4m hexagonal off-axis prototype mirror segments, one circular segment, and certification of our optical test facility, we turn our attention to the challenge of segment mass-production. In this paper, we focus on the role of industrial robots, highlighting complementarity with Zeeko CNC polishing machines, and presenting results using robots to provide intermediate processing between CNC grinding and polishing. We also describe the marriage of robots and Zeeko machines to automate currently manual operations; steps towards our ultimate vision of fully autonomous manufacturing cells, with impact throughout the optical manufacturing community and beyond.

Machine Acceleration Effects on Computer Controlled Polishing

This paper analyzes the impact of tool mass acceleration (TMA) values onto footprint shape stability in computer controlled polishing, presenting the second derivative footprint recording (SECondo) method. First experimental evidence is presented, demonstrating that for bonnet polishing, acceleration of tool mass significantly alters the pressure distribution within the footprint and consequently affects its cross section. In addition, we present experimental data indicating that it is possible to compensate for TMA effects by adjusting the inclination angle of precession during CCP accordingly.

More steps towards process automation for optical fabrication

In the context of Industrie 4.0, we have previously described the roles of robots in optical processing, and their complementarity with classical CNC machines, providing both processing and automation functions. After having demonstrated robotic moving of parts between a CNC polisher and metrology station, and auto-fringe-acquisition, we have moved on to automate the wash-down operation. This is part of a wider strategy we describe in this paper, leading towards automating the decision-making operations required before and throughout an optical manufacturing cycle.

Closing the metrology/process loop in CNC polishing

This paper builds on previous reported work describing the marriage of robots and CNC polishing machines, both for the pre-processing of parts, and to automate operations hitherto manually conducted on the CNC platforms. This paper reviews strategies for metrology, then takes the work a stage forward by reporting the use of a robot to automate the exchange of a part between CNC machine and metrology station, the probing of the part, and the capture of interferometer data. This constitutes an important step towards realization of an automated manufacturing cell.

Analysis of tool-mass-acceleration effects onto sub-aperture computer controlled polishing (CCP)

Although computer controlled polishing (CCP) of aspheres and freeforms is one of the best understood state-of-the-art fab processes today, there are yet some unsolved issues: e.g. compared to bonnet polishing, fluid jet polishing is taking less iteration steps reaching the same form accuracy and ion beam figuring eventually is reaching much higher shape accuracies. This paper is a first move into solving this matter by introducing a novel footprint recording approach for CCP. To that aim, a new method for measuring the impact of a single tool mass acceleration value onto footprint shape is presented, the second derivative footprint recording (SECondo) method. First experimental evidence of the SECondo effect is presented, demonstrating that for bonnet polishing, acceleration of tool mass significantly alters the pressure distribution within the footprint and consequently affects its cross section.