H. Droogendijk

Highly sensitive micro coriolis mass flow sensor

We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 mum diameter and 1.2 mum wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.

Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

Biologically inspired sensor-designs are investigated as a possible path to surpass the performance of more traditionally engineered designs. Inspired by crickets, artificial hair sensors have shown the ability to detect minute flow signals. This paper addresses developments in the design, fabrication, interfacing and characterization of biomimetic hair flow-sensors towards sensitive high-density arrays. Improvement of the electrode design of the hair sensors has resulted in a reduction of the smallest hair movements that can be measured. In comparison to the arrayed hairs-sensor design, the detection-limit was arguably improved at least twelve-fold, down to 1 mm s–1 airflow amplitude at 250 Hz as measured in a bandwidth of 3 kHz. The directivity pattern closely resembles a figure-of-eight. These sensitive hair-sensors open possibilities for high-resolution spatio-temporal flow pattern observations.

Six-axis force-torque sensor with a large range for biomechanical applications

A silicon six-axis force–torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive read-out is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N mm of maximum torque around each axis.

Engineering of biomimetic hair-flow sensor arrays dedicated to high-resolution flow field measurements

This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering

We demonstrate that the responsivity of flow sensors for harmonic flows can be improved significantly by non-resonant parametric amplification. Using electrostatic spring softening by AC-bias voltages, increased responsivity and sharp filtering are achieved in our biomimetic flow sensors. Tunable filtering is obtained for non-resonant electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies while achieving highly selective gain of up to 20 dB.

A biomimetic accelerometer inspired by the cricket's clavate hair

Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s2 and is able to measure accelerations up to 1 g.

An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

We report on an angular accelerometer based on the semicircular channels of the vestibular system. The accelerometer consists of a water-filled circular tube, wherein the fluid flow velocity is measured thermally as a representation for the external angular acceleration. Measurements show a linear response for angular acceleration amplitudes up to 2×105° s-2.

Uncovering signals from measurement noise by electro mechanical amplitude modulation

We present an electromechanical parametric scheme to improve the low-frequency signal-to-noise ratio of energy buffering type transducers. The method is based on periodic modulation of the stiffness in the sensory system which produces upconverted replicas of the signals of interest at frequencies where measurement is less troubled by noise or other detrimental effects. We demonstrate this principle by means of capacitive biomimetic hair flow sensors, where we modulate the rotational spring stiffness by periodic electrostatic spring softening, such that a replica of the original signal is formed around the modulation frequency. Using this replica we gain up to a 25-fold improvement of the low-frequency signal-to-noise ratio and sensing threshold. For transient measurements we demonstrate that tiny signals, which are below the noise-levels in the base-band, are revealed well when upconverted to higher frequencies.

Parametric excitation of a micro Coriolis mass flow sensor

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

Characterization of bio-inspired hair flow sensors for oscillatory airflows: techniques to measure the response for both flow and pressure

Hair sensors for oscillatory airflow, operating in the regime of bulk flow, particle velocity or both, can be characterized by several methods. In this work, we discuss harmonic measurements on MEMS hair flow sensors. To characterize this type of flow sensor the use of three different types of oscillatory airflow source is investigated. A loudspeaker, a vibrating sphere and a standing wave tube all have specific characteristics regarding their acoustic field, frequency range, maximum velocity amplitude and the possibility to chose the ratio between pressure and flow velocity. They are compared and an overview is given with respect to which source is the most appropriate under specific conditions. Furthermore, by combining information from the flow setups used new insights into sensor operation can be gained.