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Dive into the research topics where Hah Sang-Rok is active.

Publication


Featured researches published by Hah Sang-Rok.


Archive | 2002

SOLUTION FOR CHEMICAL MECHANICAL POLISHING AND METHOD THEREFOR

Lee Jae-Dong; Yoon Bo-Un; Hah Sang-Rok


Archive | 2001

Cmp slurry, cmp method and shallow trench isolation method using the same

Lee Jongwon; Lee Jae-Dong; In Fugen; Hah Sang-Rok


Archive | 2002

METHOD OF FORMING CONTACT PAD OF SEMICONDUCTOR ELEMENT

Park Young-Rae; Kim Jung-Yup; In Fugen; Hah Sang-Rok


Archive | 2002

CHEMICAL MECHANICAL POLISHING SLURRY, CHEMICAL MECHANICAL POLISHING METHOD, AND SHALLOW TRENCH ELEMENT SEPARATION METHOD ADOPTING THE SAME

Lee Jongwon; Lee Jae-Dong; In Fugen; Hah Sang-Rok


Archive | 2001

Chemical/mechanical polishing slurry, used in producing shallow trench insulation in silicon wafer with oxide and nitride coatings, comprises abrasive particles in aqueous solution containing two different passivating agents

Lee Jongwon; Lee Jae-Dong; Yoon Bo-Un; Hah Sang-Rok


Archive | 2007

Polishing slurry and chemical mechanical polishing method

Lee Jae-Dong; Yoon Bo-Un; Hah Sang-Rok


Archive | 2004

METHOD FOR FORMING TRENCH, AND METHOD FOR MANUFACTURING SEMICONDUCTOR USING THE SAME

Hah Sang-Rok; Son Hong-Seong; Lee Sung-Bae


Archive | 2003

SYSTEM FOR CLEANING WAFER

Yeo In-Jun; Kim Kyung-Hyun; Nan Teirin; In Heibun; Cho Hyun-Ho; Hah Sang-Rok


Archive | 2008

Induktivität und sein Herstellungsverfahren

Son Hong-Seong; Lee Hyo-Jong; Lee Ui-Hyong; Hah Sang-Rok; Kim Il-Ryong; Kim Yi-Gwon


Archive | 2006

Wafer-Reinigungssystem und Verfahren zum Reinigen eines Wafers

Yeo In-Jun; Kim Kyung-Hyun; Nam Jeong-Lim; Yoon Byoung-Moon; Cho Hyun-Ho; Hah Sang-Rok

Collaboration


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