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Haijun Song

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Publication

Featured researches published by Haijun Song.

Archive | 2010

Photolithography equipment detecting device, method and preparation method

Huanyang Li; Haijun Song; Tianhong Yan

Archive | 2008

Transmission aligning mark combination and alignment method of light scribing device

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2009

Channel gain digital equalizing self-adapting calibration system and method

Huanyang Li; Haijun Song; Tianhong Yan

Archive | 2008

Mask alignment making and aligning used for light scribing device

Huanyang Li; Yonghui Chen; Haijun Song

Archive | 2008

Asymmetric transmission mark combination and its aligning method

Huanyang Li; Haijun Song; Yonghui Chen; Chang Zhou

Archive | 2011

Two-dimensional coding normalization mask target combination and its alignment method and aligning system

Tianhong Yan; Chang Zhou; Haijun Song; Huanyang Li; Minghui Hu

Archive | 2008

Transmission aligning mark combination used for mask alignment and mask alignment method thereof

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Lithography device sensor and detection method

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Photolithography equipment detecting device and method

Huanyang Li; Haijun Song; Yonghui Chen; Tianhong Yan; Chang Zhou

Archive | 2009

Synchronous calibration method and system for intensity sampling of pulse

Huanyang Li; Haijun Song; Tianhong Yan

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Collaboration

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