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Dive into the research topics where Hajime Kanazawa is active.

Publication


Featured researches published by Hajime Kanazawa.


Archive | 2005

Exposure apparatus, light source apparatus and device fabrication

Hajime Kanazawa


Archive | 2004

Spectrum measuring apparatus and method

Jun Ito; Hajime Kanazawa


Archive | 1994

Angular velocity detection method and angular velocity detection apparatus

Takashi Maeno; Takayuki Tsukimoto; Hajime Kanazawa; Ichiro Chiba


Archive | 2006

Light source apparatus, exposure apparatus and device fabrication method

Hajime Kanazawa; Yutaka Watanabe; Jun Ito; Kazuki Fujimoto


Archive | 2004

Apparatus and method for measuring EUV light intensity distribution

Hajime Kanazawa; Akira Miyake


Archive | 2005

EUV light spectrum measuring apparatus and calculating method of EUV light intensity

Hajime Kanazawa; Akira Miyake; Fumitaro Masaki


Archive | 2013

OSCILLATORY WAVE MOTOR

Hajime Kanazawa


Archive | 2011

DRIVING METHOD FOR PIEZOELECTRIC VIBRATOR, AND DUST REMOVING DEVICE AND ULTRASONIC MOTOR USING THE DRIVING METHOD

Hajime Kanazawa


Archive | 2011

Vibration type driving apparatus

Kaishi Ohashi; Hajime Kanazawa


Archive | 2005

Device for measuring angular distribution of EUV light intensity, and method for measuring angular distribution of EUV light intensity

Jun Ito; Hajime Kanazawa

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