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Hanh D. Nguyen

Applied Materials

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Publication

Featured researches published by Hanh D. Nguyen.

Archive | 2004

Dual gas faceplate for a showerhead in a semiconductor wafer processing system

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Anh N. Nguyen; Steve H. Chiao; Hanh D. Nguyen

Archive | 2010

Flow control features of cvd chambers

Kien N. Chuc; Qiwei Liang; Hanh D. Nguyen; Matthew L. Miller; Soonam Park; Toan Q. Tran; Adib Khan; Jang-Gyoo Yang; Dmitry Lubomirsky; Shankar Venkataraman

Archive | 1998

Prevention of ground fault interrupts in a semiconductor processing system

Hong Bee Teoh; James Jin-Long Chen; Cuong C. Nguyen; Hanh D. Nguyen

Archive | 2007

Method of correcting baseline skew by a novel motorized source coil assembly

Wei Liu; Johanes F. Swenberg; Hanh D. Nguyen; Son T. Nguyen; Roger Curtis; Philip A. Bottini

Archive | 2007

Dual zone gas injection nozzle

Wei Liu; Johanes Swenberg; Hanh D. Nguyen; Son T. Nguyen; Roger Curtis; Philip A. Bottini

Archive | 2012

METHODS AND APPARATUS FOR CLEANING SUBSTRATE SURFACES WITH ATOMIC HYDROGEN

Joe Griffith Cruz; Jeongwon Park; Pravin K. Narwankar; Nate Si Nguyen; Hanh D. Nguyen; To Chan; Jingjing Xu

Archive | 2001

method of cvd titanium nitride film deposition for increased titanium nitride film uniformity

Jianhua Hu; Hanh D. Nguyen; Steve H. Chiao; Xiaoxiong Yuan; Anzhong Chang; Hongbee Teoh; Avgerinos V. Gelatos

Archive | 2007

Apparatus and method for processing a substrate using inductively coupled plasma technology

Johanes F. Swenberg; Wei Liu; Hanh D. Nguyen; Son T. Nguyen; Roger Curtis; Philip A. Bottini; Michael J. Mark; Theresa Kramer Guarini; Woong Choi

Archive | 2007

Apparatus and method for controlling edge performance in an inductively coupled plasma chamber

Wei Liu; Johanes F. Swenberg; Hanh D. Nguyen; Son T. Nguyen; Roger Curtis; Philip A. Bottini; Michael J. Mark

Archive | 2013

SHOWERHEAD DESIGNS OF A HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD) CHAMBER

Hanh D. Nguyen; Joe Griffith Cruz

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Philip A. Bottini

Applied Materials

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Roger Curtis

Applied Materials

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Son T. Nguyen

Applied Materials

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Wei Liu

Applied Materials

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Johanes F. Swenberg

Applied Materials

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Joe Griffith Cruz

Applied Materials

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Michael J. Mark

Applied Materials

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Steve H. Chiao

Applied Materials

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Adib Khan

Applied Materials

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Anh N. Nguyen

Applied Materials

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