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Hans-Juergen Heinrich

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Publication

Featured researches published by Hans-Juergen Heinrich.

Archive | 2012

SEALING DEVICE FOR ROTARY FEEDTHROUGH

Hans-Juergen Heinrich; Ulf Seyfert; Peter Botzler

Archive | 2009

Drive end-block for a rotatable magnetron

Hans-Juergen Heinrich; Goetz Grosser; Thorsten Sander

Archive | 2007

Supply end block for rotary magnetron

Hans-Juergen Heinrich; Goetz Teschner; Thorsten Sander; Cornell Weidelt; Joern Brueckner

Archive | 2009

END-BLOCK FOR A MAGNETRON DEVICE WITH A ROTATABLE TARGET, AND VACUUM COATING APPARATUS

Hans-Juergen Heinrich; Goetz Grosser; Sven Haehne; Ulf Seyfert

Archive | 2002

Process for the intermediate treatment of substrates used in in-line vacuum deposition devices comprises transporting the substrates on carriers through a vacuum deposition device

Joern Brueckner; Hans-Juergen Heinrich; Christian Heinzelmann; Christian Hubert; Erwin Zschieschang

Archive | 2014

SPUTTERING MAGNETRON AND METHOD FOR DYNAMICALLY INFLUENCING THE MAGNETIC FIELD

Hans-Juergen Heinrich; Sven Haehne; Rolf Rank

Archive | 2009

ENDBLOCK FOR A MAGNETRON DEVICE WITH A ROTATABLE TARGET

Hans-Juergen Heinrich; Ulf Seyfert; Goetz Teschner

Archive | 2014

BEARING ARRANGEMENT FOR ROTATABLY MOUNTING AN ELECTRODE AND ELECTRODE ARRANGEMENT

Hans-Juergen Heinrich; Gerit Stude; Goetz Grosser

Archive | 2009

ROTATABLE SPUTTER TARGET COMPRISING AN END-BLOCK WITH A LIQUID COOLANT SUPPLY SYSTEM

Thorsten Sander; Cornell Weidelt; Hans-Juergen Heinrich

Archive | 2008

MAGNETRON END-BLOCK WITH SHIELDED TARGET MOUNTING ASSEMBLY

Hans-Juergen Heinrich; Goetz Grosser; Thorsten Sander; Ulf Seyfert

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