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Hans-Jürgen Heinrich

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Publication

Featured researches published by Hans-Jürgen Heinrich.

Archive | 2010

Dichtungseinrichtung für Drehdurchführung

Hans-Jürgen Heinrich; Ulf Seyfert; Peter Botzler

Archive | 2009

Supply endblock to supply sputter cathode with coolant, comprises housing with connection opening, fastening area for introducing housing on first supporting surface and bearing opening, supporting component, shaft, and supporting unit

Hans-Jürgen Heinrich; Ulf Seyfert

Archive | 2010

Endblock für eine Magnetronanordnung mit einem rotierenden Target und Vakuumbeschichtungsanlage

Hans-Jürgen Heinrich; Götz Großer; Sven Hähne; Ulf Seyfert

Archive | 2009

Stützeinrichtung für eine Magnetronanordnung mit einem rotierenden Target

Harald Grune; Sven Hähne; Hans-Jürgen Heinrich; Götz Teschner

Archive | 2008

Supply end block for supplying magnetrons to sputtering device, comprises pivoting bearing for mounting sputtering device, where electrical connections are provided for electrical voltage supply of sputtering device

Hans-Christian Hecht; Hans-Jürgen Heinrich; Thorsten Sander; Dietmar Schulze; Ulf Seyfert

Archive | 2006

Collimator for vacuum deposition installations comprises a lance tube arranged on the side of a collimator tube facing away from the plasma for closing the opening of the collimator tube

Dethart Dämmig; Hans-Jürgen Heinrich; Stanley Rehn; Götz Teschner

Archive | 2015

Endblock-Anordnung und Prozessier-Anordnung

Hans-Jürgen Heinrich; Frank Benecke; Thomas Niederhausen; Gerit Stude; Hubertus Von Der Waydbrink

Archive | 2010

Supporting device for a magnetron arrangement having a rotating target, comprises a drive shaft, at which a first end for connecting to the rotating target is formed and a second end for introducing a torque is formed, and a drive unit

Harald Grune; Hans-Jürgen Heinrich

Archive | 2010

Endblock für eine Magnetronanordnung mit einem rotierenden Target

Hans-Jürgen Heinrich; Ulf Seyfert; Götz Teschner

Archive | 2016

Induktiv gekoppelte Plasmaquelle und Vakuumprozessieranlage

Hans-Jürgen Heinrich; Götz Teschner; Steffen Mosshammer; Jörg Anderson; Gunter Franz; Harald Grune

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