Is this you? Create Your Porfile
Avatar

Harada Shigeru

Mitsubishi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Harada Shigeru is active.

Explore More

Publication

Featured researches published by Harada Shigeru.

Archive | 1987

MANUFACTURE OF SEMICONDUCTOR BY PLASMA REACTION

Tanaka Eisuke; Harada Shigeru; Obata Masanori

Archive | 1990

Wiring connection structure of semiconductor integrated circuit device and its manufacture

Harada Shigeru; Arima Junichi; Fujiki Akimasa

Archive | 1994

Manufacture and manufacturing method of semiconductor integrated circuit device

Harada Shigeru; Yamashita Takashi; Fujiki Akimasa; Tanaka Tsutomu

Archive | 1991

Interconnection of 2 aluminium@ metallisation layers in semiconductor - using reactive first layer and a transition layer between the aluminium layers in via-contacts

Harada Shigeru; Arima Junichi; Fujiki Noriaki

Archive | 1992

WIRING CONNECTION STRUCTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND FABRICATION THEREOF

Harada Shigeru; Kishibe Kenji; Daihisa Akira; Tanaka Eisuke; Mochizuki Hiroshi

Archive | 1991

HALBLEITEREINRICHTUNG MIT SCHUTZISOLIERSCHICHT UND HERSTELLUNGSVERFAHREN FUER DIESELBE

Harada Shigeru

Archive | 1988

VORRICHTUNG ZUR HERSTELLUNG VON DUENNFILMEN

Harada Shigeru; Noguchi Takeshi; Mochizuki Hiroshi

Archive | 2003

Herstellungsverfahren einer isolierenden Zwischenschicht auf einem Halbleitersubstrat

Matsubara Junko; Tajima Toru; Harada Shigeru

Archive | 1990

VORRICHTUNG ZUR HERSTELLUNG VON DUENNSCHICHTEN

Harada Shigeru

Archive | 1986

Protective tape for grinding of semiconductor substrate

Harada Shigeru; Moriya Junichi; Arima Junichi; Obata Masanori; Nakamura Mitsuyoshi; Ikegami Masaaki

Explore More

Collaboration

Dive into the Harada Shigeru's collaboration.

Top Co-Authors
Avatar

Arima Junichi

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Obata Masanori

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Mochizuki Hiroshi

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Hagi Kimio

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Tamaki Reiji

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Tanaka Eisuke

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Fujiki Noriaki

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Kishibe Kenji

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Noguchi Takeshi

Mitsubishi

View shared research outputs
Top Co-Authors
Avatar

Furuta Isao

Mitsubishi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge