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Dive into the research topics where Hareesh Thridandam is active.

Publication


Featured researches published by Hareesh Thridandam.


Archive | 2008

Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon-Containing Films

Hareesh Thridandam; Manchao Xiao; Xinjian Lei; Thomas Richard Gaffney; Eugene Joseph Karwacki


Archive | 2006

Process for producing silicon oxide films from organoaminosilane precursors

Hareesh Thridandam; Manchao Xiao; Xinjian Lei; Thomas Richard Gaffney


Archive | 2001

Ionic additives for extreme low dielectric constant chemical formulations

Robert Parkash Mandal; Alexandros T. Demos; Timothy Weidman; Michael P. Nault; Nikolaos Bekiaris; Scott Jeffrey Weigel; Lee Arthur Senecal; James Edward Mac Dougall; Hareesh Thridandam


Archive | 2007

ORGANOSILANE COMPOUNDS FOR MODIFYING DIELECTRICAL PROPERTIES OF SILICON OXIDE AND SILICON NITRIDE FILMS

Manchao Xiao; Hareesh Thridandam; Eugene Joseph Karwacki; Xinjian Lei


Archive | 2006

Preparation of metal silicon nitride films via cyclic deposition

Xinjian Lei; Hareesh Thridandam; Kirk Scott Cuthill; Arthur Kenneth Hochberg


Archive | 2007

Cyclic chemical vapor deposition of metal-silicon containing films

Xinjian Lei; Hareesh Thridandam; Manchao Xiao; Heather Regina Bowen; Thomas Richard Gaffney


Archive | 2007

Method for manufacturing silicon oxide film from organic amino silane precursor

Thomas Richard Gaffney; Xinjian Lei; Hareesh Thridandam; Manchao Xiao; レイ シンジャン; リチャード ガフネイ トーマス; スリダンダム ハーレッシュ; シャオ マンチャオ


Archive | 2006

Organometallic complexes and their use as precursors to deposit metal films

Xinjian Lei; Manchao Xiao; Hareesh Thridandam; Kirk Scott Cuthill


Archive | 2006

Organometallic complex and method for depositing using the same

Kirk Scott Cuthill; Xinjian Lei; Hareesh Thridandam; Manchao Xiao; スコット クシール カーク; レイ シンジャン; スリダンダム ハリーシュ; シャオ マンチャオ


Archive | 2007

Diethylsilane as a silicon source in the deposition of metal silicate films

Robert D. Clark; Hareesh Thridandam; Kirk Scott Cuthill; Arthur Kenneth Hochberg

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