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Dive into the research topics where Harrie J. Stevens is active.

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Featured researches published by Harrie J. Stevens.


Machining Science and Technology | 2000

PERFORMANCE CHARACTERIZATION OF CERIUM OXIDE ABRASIVES FOR CHEMICAL-MECHANICAL POLISHING OF GLASS

Robert Sabia; Harrie J. Stevens

Abstract Investigation of the nature of chemomechanical polishing (CMP) for glass requires an in-depth knowledge of the influences of abrasive physical properties and slurry chemistry. In the present work, eight cerium oxide abrasives were used to polish fused silica on a polyurethane pad. Results from pre-polished surfaces re-polished in aqueous and non-aqueous suspensions and from corrosion testing of solutions recovered from abrasive suspensions were used to discern chemical, chemomechanical, and mechanical equivalents for each abrasive. Performance indices (i.eabrasive quality values) were generated from the equivalents and related to conventional polishing of lapped surfaces. Optimally performing abrasives were found to require a balance of equivalents (i.eset ratio) as dictated by inherent chemical activities, heat treatments, and milling. From solution chemistry testing, particle/workpiece attraction via surface charge was found to increase the chemomechanical effect. The CMP mechanism is concluded to be a chemical reaction at the particle/workpiece interface promoted primarily by mechanical interactions such as abrasion, with both cerium oxide and rare-earth oxyfluoride constituents promoting the reaction.


Optical Science, Engineering and Instrumentation '97 | 1997

Glass-ceramics: deterministic microgrinding, lapping, and polishing

John C. Lambropoulos; Birgit E. Gillman; Yiyang Zhou; Stephen D. Jacobs; Harrie J. Stevens

Glass-ceramics are composites consisting of glass and crystalline phases. We report a series of microgrinding and polishing experiments: our first goal is to correlate material mechanical properties with the quality of the resulting surface, determined by surface microroughness and surface grinding-induced residual stresses. Our second goal is to compare deterministic microgrinding and loose abrasive microgrinding in terms of material removal rates and resulting surface quality.


Archive | 1995

Method for breaking a glass sheet

Harrie J. Stevens


Archive | 2000

Extreme ultraviolet soft x-ray projection lithographic method and mask devices

Claude L. Davis; Kenneth Edward Hrdina; Robert Sabia; Harrie J. Stevens


Archive | 2000

Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms

Charles Michael Darcangelo; Robert Sabia; Harrie J. Stevens; Paul J. Williamson


Journal of Non-crystalline Solids | 1999

Pitting of a glass-ceramic during polishing with cerium oxide

Robert Sabia; Harrie J. Stevens; James R. Varner


Archive | 2000

Detecting inclusions in transparent sheets

Harrie J. Stevens; C. Charles Yu


Archive | 1999

Colloidal polishing of fused silica

Charles Michael Darcangelo; Robert Sabia; Harrie J. Stevens


Archive | 1999

Colloidal silica polishing abrasive

Robert Sabia; Harrie J. Stevens


Journal of the American Ceramic Society | 2005

Deterministic Microgrinding, Lapping, and Polishing of Glass–Ceramics

John C. Lambropoulos; Stephen D. Jacobs; Birgit E. Gillman; Harrie J. Stevens

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