Harumi Suzuki
Denso
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Publication
Featured researches published by Harumi Suzuki.
Applied Surface Science | 1997
Susumu Sobue; T. Yamauchi; Harumi Suzuki; Shinichi Mukainakano; O. Takenaka; T. Hattori
Abstract We have been investigated the diffusion barrier properties of the reactively sputtered titanium nitride (TiN) in Al1wt%Si0.5wt%Cu/TiN/Ti/Si system. The lower dense but N-rich TiN film was easy to react with the Al, showing the poor diffusion barrier properties. By means of plan-view TEM, lots of disorder regions and vacancies in the TiN film could be observed. We conclude that the rearrangement in the lower dense films is easier to occur by thermal treatment, giving rise to diffusion of Ti atoms, even if the TiN is N-rich film. This conclusion indeed implies the dense degree of the TiN film in atomic level has a significant effect on the reaction between the TiN and the Al, or the diffusion barrier properties.
Archive | 1999
Harumi Suzuki; Takeshi Ishikawa; Junji Kido
Archive | 2005
Koji Sato; Kahoru Mori; Akito Toyoda; Masayoshi Muramatsu; Masaaki Ozaki; Takaharu Idogaki; Tsuneo Uchida; Harumi Suzuki
Archive | 2001
Ryonosuke Tera; Toshiki Itoh; Atsushi Yamamoto; Harumi Suzuki; Masaaki Ozaki; Takeshi Yamauchi
Archive | 2000
Harumi Suzuki; Masao Nagakubo
Archive | 2000
Harumi Suzuki; Tetsuya Kato
Archive | 2003
Ryonosuke Tera; Toshiki Itoh; Atsushi Yamamoto; Harumi Suzuki; Masaaki Ozaki; Takeshi Yamauchi
Archive | 2007
Masamichi Ikai; Masayuki Katayama; Hiromichi Kato; Yoshihiro Kikuzawa; Tomohiko Mori; Toshiichi Sato; Harumi Suzuki; 敏一 佐藤; 博道 加藤; 朋彦 森; 片山 雅之; 正道 猪飼; 良弘 菊澤; 晴視 鈴木
Archive | 1996
Masao Nagakubo; Harumi Suzuki; Takashi Kurahashi
Archive | 2003
Harumi Suzuki; Kahoru Mori; Hiromichi Kato; Shoichi Kawai
