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Haruna Kawashima

Canon Inc.

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Publication

Featured researches published by Haruna Kawashima.

Archive | 1991

Method and apparatus for precisely detecting surface position of a patterned wafer

Haruna Kawashima; Akiyoshi Suzuki

Archive | 1991

Device for detecting the position of a surface

Takahiro Akamatsu; Haruna Kawashima; Hiroyoshi Kubo

Archive | 1997

Surface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regions

Haruna Kawashima

Archive | 1995

Surface position detecting device

Haruna Kawashima

Archive | 1993

Device for optically detecting inclination of a surface

Haruna Kawashima

Archive | 1991

Surface position detecting method at a predetermined and plurality of adjacent points

Haruna Kawashima; Akiyoshi Suzuki

Archive | 1995

Exposure method and exposure apparatus using the same

Yoshiharu Kataoka; Haruna Kawashima; Yuichi Yamada

Archive | 1989

Autofocusing system for a projecting exposure apparatus

Akiyoshi Suzuki; Haruna Kawashima

Archive | 2000

Scanning exposure apparatus with surface position detecting system

Haruna Kawashima

Archive | 1988

Detection of surface position

Haruna Kawashima; Akiyoshi Suzuki

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Collaboration

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Akiyoshi Suzuki

Canon Inc.

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Nobuyuki Saito

Canon Inc.

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Ayako Kadono

Canon Inc.

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Hiroyoshi Kubo

Canon Inc.

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Masato Muraki

Canon Inc.

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Takahiro Akamatsu

Canon Inc.

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Yoshiharu Kataoka

Canon Inc.

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Yuichi Yamada

Canon Inc.

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