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Hegeng Mei

Tsinghua University

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Publication

Featured researches published by Hegeng Mei.

Applied Surface Science | 2014

Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry

Jie Cheng; Tongqing Wang; Hegeng Mei; Wenbin Zhou; Xinchun Lu

Archive | 2011

Chemical mechanical polishing machine and chemical mechanical polishing equipment with same

Xinchun Lu; Zhenjie Xu; Yongyong He; Tongqing Wang; Pan Shen; Dewen Zhao; Hegeng Mei; Lianqing Zhang; Zhaohui Pei; Jianbin Luo

Archive | 2011

Embedded retaining ring for chemical mechanical polishing

Xinchun Lu; Hegeng Mei; Pan Shen; Yongyong He; Jianbin Luo

Archive | 2011

Novel chemical machinery polishing device

Xinchun Lu; Hegeng Mei; Yongyong He; Jianbin Luo

Archive | 2011

Brushing device for wafer

Xinchun Lu; Hegeng Mei; Zhaohui Pei; Yating Huang; Yongyong He; Jianbin Luo

Archive | 2011

Novel chemical mechanical polishing device

Xinchun Lu; Hegeng Mei; Yongyong He; Jianbin Luo

Archive | 2011

Wafer cleaning device and method for cleaning wafer by using same

Xinchun Lu; Yan Pan; Pan Shen; Hegeng Mei; Dewen Zhao; Tongqing Wang; Yongyong He

Archive | 2011

CHEMICAL MECHANICAL POLISHING MACHINE AND CHEMICAL MECHANICAL POLISHING APPARATUS COMPRISING THE SAME

Xinchun Lu; Zhenjie Xu; Yongyong He; Tongqing Wang; Pan Shen; Dewen Zhao; Hegeng Mei; Lianqing Zhang; Zhaohui Pei; Jianbin Luo

Science China-technological Sciences | 2014

A kinematic model describing particle movement near a surface as effected by Brownian motion and electrostatic and Van der Waals forces

Hegeng Mei; Dewen Zhao; TongQin Wang; Jie Cheng; Xinchun Lu

Archive | 2012

Supporting wheel component for wafer cleaning and vertical cleaning device for wafers

Xinchun Lu; Zhaohui Pei; Hegeng Mei; Yongyong He

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Collaboration

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Xinchun Lu

Tsinghua University

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Yongyong He

Tsinghua University

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Jianbin Luo

Tsinghua University

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Dewen Zhao

Tsinghua University

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Tongqing Wang

Tsinghua University

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Jie Cheng

Tsinghua University

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TongQin Wang

Tsinghua University

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Wenbin Zhou

Tsinghua University

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Yan Pan

Tsinghua University

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Yating Huang

Tsinghua University

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