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Helmut Skapa

Bosch

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Publication

Featured researches published by Helmut Skapa.

Archive | 1996

Method of producing acceleration sensors

Horst Munzel; Michael Offenberg; Klaus Heyers; Bernhard Elsner; Markus Lutz; Helmut Skapa; Heinz-Georg Vossenberg; Nicholas Buchan; Eckhard Graf

Archive | 1999

Method for fabricating a micromechanical component

Helmut Skapa; Horst Muenzel; Franz Laermer; Michael Offenberg; Heinz-Georg Vossenberg

Archive | 1999

Surface decontamination apparatus, especially for organic contaminant removal from a structured silicon wafer or body, comprises an ozone reactor in which a structured body is heated during ozone exposure

Volker Becker; Doris Schielein; Helmut Skapa; Franz Laermer; Michael Offenberg; Andrea Schilp; Gregor Petermann

Archive | 1998

NONSTICK LAYER FOR A MICROMECHANICAL COMPONENT

Martin Dr. Schoefthaler; Peter Hein; Helmut Skapa; Horst Muenzel

Archive | 1998

Micro-mechanical component

Martin Schoefthaler; Peter Hein; Helmut Skapa; Horst Muenzel

Archive | 1998

Verfahren zur Herstellung von mikromechanischen Bauelementen und mikromechanisches Bauelement

Martin Dr. Schoefthaler; Peter Hein; Helmut Skapa; Horst Muenzel

Archive | 1998

Adhäsionshemmende schutzschicht für ein mikromechanisches bauelement

Martin Schöfthaler; Peter Hein; Helmut Skapa; Horst Muenzel

Archive | 1998

Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components

Peter Hein; Horst Muenzel; Martin Dr. Schoefthaler; Helmut Skapa

Archive | 1996

Verfahren zur Herstellung von Beschleunigungssensoren A process for producing acceleration sensors

Horst Muenzel; Michael Offenberg; Klaus Heyers; Bernhard Elsner; Markus Lutz; Helmut Skapa; Heinz-Georg Vossenberg; Nicholas Buchan; Eckhard Graf

Archive | 1996

A process for the manufacture of acceleration sensors

Nicholas Buchan; Bernhard Elsner; Eckhard Graf; Klaus Heyers; Markus Lutz; Horst Munzel; Michael Offenberg; Helmut Skapa; Heinz-Georg Vossenberg

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Collaboration

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Horst Muenzel

Bosch

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Michael Offenberg

Bosch

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Peter Hein

Infineon Technologies

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Heinz-Georg Vossenberg

Bosch

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Martin Dr. Schoefthaler

Infineon Technologies

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Bernhard Elsner

Bosch

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Eckhard Graf

Bosch

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Klaus Heyers

Bosch

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Markus Lutz

Bosch

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Nicholas Buchan

Bosch

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