Henri R. J. R. Van Helleputte
Philips
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Henri R. J. R. Van Helleputte.
Microelectronic Engineering | 1995
Henri R. J. R. Van Helleputte; Theo Haddeman; Martin J. Verheijen; Jan-Jaap Baalbergen
Non destructive measurements are of great interest in 3D metrology (contact holes, grating structures and resist profiles). Conventional measurement techniques to obtain 3D information are SEM and TEM cross section, but are destructive. In this report a comparative study is presented between SPM, SEM and TEM. Simulations and measurements indicate that the tip shape is the limiting factor for using SPM as a 3D measurement tool. Pitch and height can be measured accurately with SPM, provided good calibration. Linewidth measurements show a dead zone, depending on tip geometry.
Archive | 1996
Petrus F. G. Bongaerts; Henri R. J. R. Van Helleputte; Adrianus L. J. Burgmans; Jacob Bruinink; Babar A. Khan; Karel Elbert Kuijk
Archive | 1996
Babar A. Khan; Henri R. J. R. Van Helleputte; Adrianus L. J. Burgmans; Karel Elbert Kuijk; Petrus F. G. Bongaerts; Jacob Bruinink
Archive | 1996
Babar A. Khan; Henri R. J. R. Van Helleputte; Adrianus L. J. Burgmans; Petrus F. G. Bongaerts; Karel Elbert Kuijk; Jacob Bruinink
Archive | 1996
Petrus F. G. Bongaerts; Jacob Bruinink; Adrianus L. J. Burgmans; Henri R. J. R. Van Helleputte; Babar A. Khan; Karel Elbert Kuijk
Archive | 1996
Petrus F. G. Bongaerts; Jacob Bruinink; Adrianus L. J. Burgmans; Henri R. J. R. Van Helleputte; Babar A. Khan; Karel Elbert Kuijk; Thomas S. Buzak; Kevin J. Ilcisin; Paul Martin
Archive | 1994
Petrus F. G. Bongaerts; Jacob Bruinink; Adrianus L. J. Burgmans; Henri R. J. R. Van Helleputte; Babar A. Khan; Karel Elbert Kuijk
Archive | 1997
Babar A. Khan; Henri R. J. R. Van Helleputte; Adrianus L. J. Burgmans; Petrus F. G. Bongaerts; Karel Elbert Kuijk; Jacob Bruinink
Archive | 1995
Henri R. J. R. Van Helleputte; Jacob Bruinink; Adrianus L. J. Burgmans; Petrus F. G. Bongaerts; Babar A. Khan; Karel Elbert Kuijk
Archive | 2001
Babar A. Khan; Henri R. J. R. Van Helleputte; Adrianus L. J. Burgmans; Petrus F. G. Bongaerts; Karel Elbert Kuijk; Jacob Bruinink
