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Dive into the research topics where Henry Guckel is active.

Publication


Featured researches published by Henry Guckel.


Archive | 1992

Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers

Henry Guckel


Archive | 1986

Sealed cavity semiconductor pressure transducers and method of producing the same

Henry Guckel; David W. Burns


Archive | 1993

Formation of microstructures using a preformed photoresist sheet

Henry Guckel; Todd R. Christenson; Kenneth J. Skrobis


Archive | 1992

Polysilicon resonating beam transducers and method of producing the same

Henry Guckel; Jeffrey J. Sniegowski


Archive | 1987

Polysilicon thin film process

Henry Guckel; David W. Burns


Archive | 1991

Method of manufacturing micromechanical devices

Henry Guckel; Todd R. Christenson; Kenneth J. Skrobis


Archive | 1995

Micromechanical magnetically actuated devices

Henry Guckel; Jonathan L. Klein; Thomas L. Earles


Archive | 1990

Polysilicon resonating beam transducers

Henry Guckel; Jeffry Sniegowski


Archive | 1978

Electrostatically deformable thin silicon membranes

Henry Guckel; Steven T. Larsen


Archive | 1992

Micromachined differential pressure transducers

Henry Guckel; Todd R. Christensen

Collaboration


Dive into the Henry Guckel's collaboration.

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Todd R. Christenson

Wisconsin Alumni Research Foundation

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Jeffrey J. Sniegowski

Wisconsin Alumni Research Foundation

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Kenneth J. Skrobis

Wisconsin Alumni Research Foundation

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David W. Burns

Wisconsin Alumni Research Foundation

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Jeffry Sniegowski

Wisconsin Alumni Research Foundation

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Jonathan L. Klein

Wisconsin Alumni Research Foundation

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Pawitterjit S. Mangat

Wisconsin Alumni Research Foundation

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Steven T. Larsen

Wisconsin Alumni Research Foundation

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Eric Stiers

Wisconsin Alumni Research Foundation

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Harald Emmerich

Wisconsin Alumni Research Foundation

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