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Dive into the research topics where Herbert Legall is active.

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Featured researches published by Herbert Legall.


Optics Express | 2012

Compact x-ray microscope for the water window based on a high brightness laser plasma source

Herbert Legall; G. Blobel; H. Stiel; W. Sandner; C. Seim; Per Takman; D. H. Martz; M. Selin; Ulrich Vogt; Hans M. Hertz; D. Esser; H. Sipma; J. Luttmann; M. Höfer; H. D. Hoffmann; S. Yulin; T. Feigl; Stefan Rehbein; Peter Guttmann; Gerd Schneider; U. Wiesemann; M. Wirtz; W. Diete

We present a laser plasma based x-ray microscope for the water window employing a high-average power laser system for plasma generation. At 90 W laser power a brightness of 7.4 x 10(11) photons/(s x sr x μm(2)) was measured for the nitrogen Lyα line emission at 2.478 nm. Using a multilayer condenser mirror with 0.3 % reflectivity 10(6) photons/(μm(2) x s) were obtained in the object plane. Microscopy performed at a laser power of 60 W resolves 40 nm lines with an exposure time of 60 s. The exposure time can be further reduced to 20 s by the use of new multilayer condenser optics and operating the laser at its full power of 130 W.


Optics Letters | 2012

High average brightness water window source for short-exposure cryomicroscopy

D. H. Martz; M. Selin; O. von Hofsten; Emelie Fogelqvist; Anders Holmberg; Ulrich Vogt; Herbert Legall; G. Blobel; C. Seim; H. Stiel; Hans M. Hertz

Laboratory water window cryomicroscopy has recently demonstrated similar image quality as synchrotron-based microscopy but still with much longer exposure times, prohibiting the spread to a wider scientific community. Here we demonstrate high-resolution laboratory water window imaging of cryofrozen cells with 10 s range exposure times. The major improvement is the operation of a λ=2.48 nm, 2 kHz liquid nitrogen jet laser plasma source with high spatial and temporal stability at high average brightness >1.5×10(12) ph/(s×sr×μm(2)×line), i.e., close to that of early synchrotrons. Thus, this source enables not only biological x-ray microscopy in the home laboratory but potentially other applications previously only accessible at synchrotron facilities.


11th International Conference on X-Ray Microscopy, XRM 2012; Shanghai; China; 5 August 2012 through 10 August 2012 | 2013

A compact Laboratory Transmission X-ray Microscope for the water window

Herbert Legall; Holger Stiel; G. Blobel; Christian Seim; Jonas Baumann; S. Yulin; D. Esser; M. Hoefer; U. Wiesemann; M. Wirtz; G. Schneider; S. Rehbein; H. M. Hertz

In the water window (2.2 – 4.4 nm) the attenuation of radiation in water is significantly smaller than in organic material. Therefore, intact biological specimen (e.g. cells) can be investigated in their natural environment. In order to make this technique accessible to users in a laboratory environment a Full-Field Laboratory Transmission X-ray Microscope (L-TXM) has been developed. The L-TXM is operated with a nitrogen laser plasma source employing an InnoSlab high power laser system for plasma generation. For microscopy the Lyα emission of highly ionized nitrogen at 2.48 nm is used. A laser plasma brightness of 5 × 1011 photons/(s × sr × μm2 in line at 2.48 nm) at a laser power of 70 W is demonstrated. In combination with a state-of-the-art Cr/V multilayer condenser mirror the sample is illuminated with 106 photons/(μm2 × s). Using objective zone plates 35 – 40 nm lines can be resolved with exposure times < 60 s. The exposure time can be further reduced to 20 s by the use of new multilayer condenser optics and operating the laser at its full power of 130 W. These exposure times enable cryo tomography in a laboratory environment.


Review of Scientific Instruments | 2004

High resolution x-ray absorption spectroscopy using a laser plasma radiation source

Ulrich Vogt; Thomas Wilhein; Holger Stiel; Herbert Legall

In this article we present a setup of a spectrometer for near edge x-ray absorption spectroscopy at the carbon K-edge (284 eV). The spectrometer works with a laser produced plasma as x-ray source and a single x-ray optical element in grazing incidence configuration called off-axis reflection zone plate. Using different sample foils we were able to demonstrate a spectral resolution of E/ΔE≈600. The positions of specific absorption peaks are in agreement with data measured at synchrotron sources. Since the off-axis zone plate is a focusing system, the x-ray flux in the detector plane is high enough to record an absorption spectrum on a charge-coupled device detector with a single shot. In the single shot modus a spectrum can be recorded before a sample degradation takes place. This will enable time-resolved experiments using pump-probe techniques.


Journal of Applied Crystallography | 2009

An efficient X-ray spectrometer based on thin mosaic crystal films and its application in various fields of X-ray spectroscopy

Herbert Legall; Holger Stiel; Marcel Pagels; Birgit Kanngießer; Matthias Müller; Burkhard Beckhoff; Inna Grigorieva; Alexander Antonov; Vladimir A. Arkadiev; Aniouar Bjeoumikhov

X-ray optics with high energy resolution and collection efficiency are required in X-ray spectroscopy for investigations of chemistry and coordination. This is particularly the case if the X-ray source emits a rather weak signal into a large solid angle. In the present work the performance of a spectrometer based on thin mosaic crystals was investigated for different spectroscopic methods using various X-ray sources. It was found that, even with low-power X-ray sources, advanced high-resolution X-ray spectroscopy can be performed.


Photosynthesis Research | 1997

Acceptor side photoinhibition in PS II: On the possible effects of the functional integrity of the PS II donor side on photoinhibition of stable charge separation

A. Napiwotzki; Axel Bergmann; Katrin Decker; Herbert Legall; Hann-Jörg Eckert; Hans-Joachim Eichle; Gernot Renger

Photoinhibition under aerobic and anaerobic conditions was analyzed in O2-evolving and in Tris-treated PS II-membrane fragments from spinach by measuring laser-flash-induced absorption changes at 826 nm reflecting the transient P680+ formation and the chlorophyll fluorescence lifetime. It was found that anaerobic photoinhibitory treatment leads in both types of samples to the appearence of two long-lived fluorescence components with lifetimes of 7 ns and 16 ns, respectively. The extent of these fluorescence kinetics depends on the state of the reaction center (open/closed) during the fluorescence measurements: it is drastically higher in the closed state. It is concluded that this long-lived fluorescence is mainly emitted from modified reaction centers with singly reduced QA(QA-). This suggests that the observation of long-lived fluorescence components cannot necessarily be taken as an indicator for reaction centers with missing or doubly reduced and protonated QA (QAH2). Time-resolved measurements of 826 nm absorption changes show that the rate of photoinhibition of the stable charge separation (P680*QA → P680+QA-), is nearly the same in O2-evolving and in Tris-treated PS II-membrane fragments. This finding is difficult to understand within the framework of the QAH2-mechanism for photoinhibition of stable charge separation because in that case the rate of photoinhibition should strongly depend on the functional integrity of the donor side of PS II. Based on the results of this study it is inferred, that several processes contribute to photoinhibition within the PS II reaction center and that a mechanism which comprises double reduction and protonation of QA leading to QAH2 formation is only of marginal – if any – relevance for photoinhibition of PS II under both, aerobic and anaerobic, conditions.


Metrology, Inspection, and Process Control for Microlithography XVII | 2003

New laboratory EUV reflectometer for large optics using a laser plasma source

Ludwig van Loyen; Thomas Boettger; Stefan Braun; Hermann Mai; Andreas Leson; Frank Scholze; Johannes Tuemmler; Gerhard Ulm; Herbert Legall; P. V. Nickles; W. Sandner; Holger Stiel; Christian E. Rempel; Mirko Schulze; Joerg Brutscher; Fritz Macco; S. Muellender

The quality assurance for production of optical components for EUV lithography strongly requires at-wavelength metrology. Presently, at-wavelength characterizations of mirrors and masks are done using the synchrotron radiation of electron storage rings, e.g. BESSY II. For the production process of EUV optics, however, the immediate access to metrology tools is necessary and availability of laboratory devices is mandatory. Within the last years a stand alone laboratory EUV reflectometer for large samples has been developed It consists of a laser produced plasma (LLP) radiation source, a monochromator and a large goniometer systme. The manipulation system of the reflectometer can handle samples with diameters of up to 500 mm, thicknesses of up to 200 mm and weights of up to 30 kg. The wavelength can be varied from 10 nm to 16 nm. The spot size on the sample surface is about 2mm. The angle of incidence can be varied from 3° to 60°. In this paper, we describe the laboratory reflectometer in detail and discuss the achieved performance. First measurements of 4 inch mirrors are presented and discussed in comparison to the results obtained at the PTB soft x-ray radiometry beamline at BESSY II.


Optics Express | 2006

High spectral resolution x-ray optics with highly oriented pyrolytic graphite

Herbert Legall; H. Stiel; V. Arkadiev; A.A. Bjeoumikhov

Thin films of highly oriented pyrolytic graphite (HOPG) give the opportunity to realize crystal optics with arbitrary geometry by mounting it on a mould of any shape. A specific feature of HOPG is its mosaicity accompanied by a high integral reflectivity, which is by an order of magnitude higher than that of all other known crystals in an energy range between 2 keV up to several 10 keV. These characteristics make it possible to realize highly efficient collecting optics, which could be also relevant for compact x-ray diagnostic tools and spectrometers. For these applications the achievable spectral resolution of the crystal optics is of interest. In this article measurements with a spectral resolution of E/DeltaE=2900 in the second order reflection and E/DeltaE=1800 in the first order reflection obtained with HOPG crystals are presented. These are by far the highest spectral resolutions reported for HOPG crystals. The integral reflectivity of these very thin films is still comparable with that of ideal Ge crystals. The trade-off between energy resolution and high integral reflectivity for HOPG is demonstrated by determining these parameters for HOPG films of different thickness.


Review of Scientific Instruments | 2004

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

Herbert Legall; H. Stiel; Ulrich Vogt; H. Schonnagel; P. V. Nickles; J. Tummler; F. Scholz; Frank Scholze

We present a laser produced plasma (LPP) source optimized for metrology and the results of its radiometric characterization. The presented (LPP) source can be used for reflectometry and spectroscopy in the soft x-ray range. For these applications, stable operation with high spectral photon yields high reliability in continuous operation and, to reach high spectral resolution, a small source size and high source point stability is necessary. For the characterization of the source, special instruments have been designed and calibrated using the soft x-ray radiometry beamline of the Physikalisch-Technische-Bundesanstalt at BESSY. These instruments are an imaging spectrometer, a double multilayer tool for in-band power measurements, a transmission slit grating spectrograph, and a pinhole camera. From the measurements a source size of 30 μm×55 μm (2σ, horizontal by vertical) and a stability of better than 5 μm horizontally and 9 μm vertically were obtained. The source provides a flat continuous emission in the...


Review of Scientific Instruments | 2011

Note: Study of extreme ultraviolet and soft x-ray emission of metal targets produced by laser-plasma-interaction

Ioanna Mantouvalou; Robert Jung; J. Tuemmler; Herbert Legall; T. Bidu; Holger Stiel; Wolfgang Malzer; Birgit Kanngießer; W. Sandner

Different metal targets were investigated as possible source material for tailored laser-produced plasma-sources. In the wavelength range from 1 to 20 nm, x-ray spectra were collected with a calibrated spectrometer with a resolution of λ/Δλ = 150 at 1 nm up to λ/Δλ = 1100 at 15 nm. Intense line emission features of highly ionized species as well as continuum-like spectra from unresolved transitions are presented. With this knowledge, the optimal target material can be identified for the envisioned application of the source in x-ray spectrometry on the high energy side of the spectra at about 1 keV. This energy is aimed for because 1 keV-radiation is ideally suited for L-shell x-ray spectroscopy with nm-depth resolution.

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Holger Stiel

Technical University of Berlin

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Birgit Kanngießer

Technical University of Berlin

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W. Sandner

Technical University of Berlin

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Christian Seim

Technical University of Berlin

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Wolfgang Malzer

Technical University of Berlin

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P. V. Nickles

Gwangju Institute of Science and Technology

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Ulrich Vogt

Royal Institute of Technology

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Ioanna Mantouvalou

Technical University of Berlin

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C. Seim

Technical University of Berlin

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