Hideto Kuramochi

Ellipsometry characterization of polycrystalline ZnO layers with the modeling of carrier concentration gradient: Effects of grain boundary, humidity, and surface texture

Spectroscopic ellipsometry (SE) has been applied to study the effects of grain boundary, humidity, and surface texture on the carrier transport properties of Al-doped ZnO layers fabricated by dc and rf magnetron sputtering. In the SE analysis, the variation in the free carrier absorption toward the growth direction, induced by the ZnO grain growth on foreign substrates, has been modeled explicitly by adopting a multilayer model in which the optical carrier concentration (Nopt) varies continuously with a constant optical mobility (μopt). The effect of the grain boundary has been studied by comparing μopt with Hall mobility (μHall). The change in μHall/μopt indicates a sharp structural transition of the ZnO polycrystalline layer at a thickness of d ∼ 500 nm, which correlates very well with the structure confirmed by transmission electron microscopy. In particular, below the transition thickness, the formation of the high density grain boundary leads to the reduction in the μHall/μopt ratio as well as Nopt. ...

Development of Novel Al-Doped Zinc Oxide Films Fabricated on Etched Glass and Their Application to Solar Cells

We have successfully developed novel aluminum-doped zinc oxide (AZO-X) films with a high haze ratio by the combined use of an etched glass substrate and wet-etched AZO-X films. The effects of the use of an etched glass substrate and wet-chemical etching on the properties of AZO-X films were investigated. The texture size and rms roughness of these films largely increased with glass surface roughening. Post-treatment using wet chemical etching slightly increased the texture size and rms roughness. The etched glass approach has been found to be a promising method for achieving an AZO-coated glass substrate with a high haze ratio. Using high-haze ratio AZO-X films as the front transparent conductive oxide (TCO) layers in solar cells, we improved the quantum efficiency (QE) of these solar cells particularly in the long-wavelength region. Thus, the AZO-X films deposited on etched glass have a high potential for use as front TCO layers in silicon-based thin-film solar cells.

Development of Novel Aluminum-Doped Zinc Oxide Film and Its Application to Solar Cells

We have developed novel aluminum-doped zinc oxide films (AZO-X and AZO-HX films) with a high haze value using wet-chemical etching for various times after dc magnetron sputtering, and have investigated their electrical and optical properties, durability under high-humidity condition, and surface morphology. The AZO-X and AZO-HX films showed good balance between transmittance in the near-infrared area and durability under 85 °C–85%RH condition. These novel films also had a higher haze value after wet chemical etching than normal AZO films. The crater size and haze value of the AZO-HX film increased with increasing etching time in comparison with those of the AZO-X film. The haze value of the AZO-HX film was higher than that of the AZO-X film; their values are 90% at 550 nm and 60% at 800 nm. Furthermore, the AZO-HX film was applied in amorphous silicon (a-Si) single-type solar cells as the front electrode. The short-circuit current of the solar cell using the AZO-HX film was higher than that of the solar cell using the AZO-X film. As an optimization-based result, an efficiency as high as 10.2% was obtained, showing that the new AZO-HX film is a promising material for the front electrode of a-Si solar cells.

Development of novel Al doped zinc oxide film and its application to solar cells

We have developed novel Al doped zinc oxide (AZO) films, AZO-X films, using d.c. magnetron sputtering process and have investigated their electro-optical properties and their surface morphology. AZO-X films showed a good balance between the transmittance in near-infrared area and the durability under 85°C-85%RH condition. And AZO-X film also had higher haze value after wet chemical etching than the value obtained in normal AZO film. Furthermore, AZO-X films have been applied to amorphous Si (a-Si) single-type solar cells as the front electrodes. The efficiency as high as 10.1% with high short-circuit current has been obtained, showing that this novel AZO-X is the new promising material for front electrode of a-Si solar cells.