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Hidetomo Suzuki

Ebara Corporation

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Publication

Featured researches published by Hidetomo Suzuki.

Archive | 1991

Method for cleaning closed spaces with ultraviolet rays

Toshiaki Fujii; Hidetomo Suzuki; Naoaki Ogure; Kazuhiko Sakamoto

Archive | 2005

Method and apparatus for the preparation of clean gases

Toshiaki Fujii; Tsukuru Suzuki; Hidetomo Suzuki; Kazuhiko Sakamoto

Archive | 1991

Method for removing hydrocarbon and equipment therefor

Toshiaki Fujii; Norimitsu Kitajima; Kazuhiko Sakamoto; Hidetomo Suzuki; 宣光 北嶋; 和彦 坂本; 敏昭 藤井; 英友 鈴木

Archive | 1992

Method and apparatus for preventing contamination of substrate or substrate surface

Toshiaki Fujii; Tsukuru Suzuki; Hidetomo Suzuki; Kazuhiko Sakamoto

Archive | 1991

Method for cleaning closed spaces

Toshiaki Fujii; Hidetomo Suzuki; Naoaki Ogure; Kazuhiko Sakamoto

Archive | 2005

Method and device for preventing contamination from occurring on surfaces of base material or substrate

Toshiaki Fujii; Kazuhiko Sakamoto; Hidetomo Suzuki; Tsukuru Suzuki; 和彦 坂本; 敏昭 藤井; 作 鈴木; 英友 鈴木

Archive | 1992

Method and device for charging fine particles in space by photoelectron

Toshiaki Fujii; Hidetomo Suzuki; 敏昭 藤井; 英友 鈴木

IEICE Transactions on Electronics | 1996

Control of Fine Particulate and Gaseous Contaminants by UV/Photoelectron Method (Special Issue on Scientific ULSI Manufacturing Technology)

Takafumi Seto; Shin Yokoyama; Kikuo Okuyama; Masataka Hirose; Toshiaki Fujii; Hidetomo Suzuki

Archive | 1992

Method and device for preventing increase in contact angle on surface of substrate or base material

Toshiaki Fujii; Kazuhiko Sakamoto; Hidetomo Suzuki; Tsukuru Suzuki; 和彦 坂本; 敏昭 藤井; 作 鈴木; 英友 鈴木

Archive | 1992

Procede et appareil de prevention de la contamination d'un substrat ou de la surface d'un substrat

Toshiaki Fujii; Tsukuru Suzuki; Hidetomo Suzuki; Kazuhiko Sakamoto

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Collaboration

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Toshiaki Fujii

Ebara Corporation

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Kazuhiko Sakamoto

Ebara Corporation

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Tsukuru Suzuki

Ebara Corporation

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Kikuo Okuyama

Hiroshima University

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Masataka Hirose

Hiroshima University

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Shin Yokoyama

Hiroshima University

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Takafumi Seto

Kanazawa University

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