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Hirayama Masaki

Tokyo Electron

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Publication

Featured researches published by Hirayama Masaki.

Archive | 2001

PLASMA PROCESS SYSTEM

Tadera Takamitsu; Hirayama Masaki; Omi Tadahiro

Archive | 2002

MICROWAVE PLASMA PROCESSING EQUIPMENT, PLASMA IGNITING METHOD, PLASMA FORMING METHOD AND PLASMA PROCESS METHOD

Omi Tadahiro; Hirayama Masaki; Sugawa Shigetoshi; Goto Tetsuya

Archive | 1998

CONTINUOUS EMISSION EXCIMER LASER OSCILLATOR, ITS METHOD, EXPOSING DEVICE, AND LASER TUBE

Ohmi Tadahiro; Tanaka Nobuyoshi; Hirayama Masaki

Archive | 2002

Device and control method for microwave plasma processing

Ohmi Tadahiro; Hirayama Masaki; Sugawa Shigetoshi; Goto Tetsuya

Archive | 2008

MICROWAVE PLASMA TREATMENT EQUIPMENT, PROCESS FOR FABRICATING DIELECTRIC WINDOW, AND MICROWAVE PLASMA TREATMENT METHOD

Horiguchi Takahiro; Omi Tadahiro; Hirayama Masaki

Archive | 2003

PLASMA PROCESSING SYSTEM AND PLASMA CONTROL METHOD

Kanetsuki Ritsuo; Tadera Takamitsu; Yamamoto Tatsushi; Hirayama Masaki; Omi Tadahiro

Archive | 2001

APPARATUS AND METHOD FOR HIGHLY EFFICIENTLY CONTROLLING TEMPERATURE AND HUMIDITY OF GAS

Omi Tadahiro; Hirayama Masaki; Shirai Yasuyuki; Hanaoka Hideo; Honma Takeshi; Suzuki Hirokazu; Yamazaki Yoshio; Okubo Yoshinori

Archive | 2001

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER MEMBER, AND MANUFACTURE OF ELECTRONIC COMPONENT

Hirayama Masaki; Omi Tadahiro; Tagusa Yasunobu

Archive | 2000

SILICON NITRIDE FILM, FORMATION METHOD THEREFOR, AND SEMICONDUCTOR DEVICE

Omi Tadahiro; Sekine Katsuyuki; Saito Yuji; Hirayama Masaki; Nitta Takehisa

Archive | 2009

MICROWAVE PLASMA TREATMENT DEVICE, AND USAGE OF MICROWAVE PLASMA TREATMENT DEVICE

Hirayama Masaki; Omi Tadahiro

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Collaboration

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Ohmi Tadahiro

Canon Inc.

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Goto Tetsuya

Tohoku University

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Sugawa Shigetoshi

Canon Inc.

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Shirai Yasuyuki

Canon Inc.

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Horiguchi Takahiro

Tohoku University

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Teramoto Akinobu

Tohoku University

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Ishihara Yoshio

Mitsubishi

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Matsuoka Takaaki

Tohoku University

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Suwa Tomoyuki

Tohoku University

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Suzuki Katsumasa

Mitsubishi

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