Hirofumi Shibata

Mask structure for lithography, method of preparation thereof and lithographic method

Lithographic mask structure and device for positioning the same

LCD with stripe-shaped insulating projections covering gap entirely between stripe-shaped electrodes

Structure of X-ray mask

LCD having a voltage being applied to the LC in the chiral nematic phase prior to the display driving

Maskenstruktur für Lithographie und Einpassvorrichtung dafür. Mask pattern for lithography and fitting device therefor.

Maskenstruktur zur lithographie, verfahren zu ihrer herstellung und lithographisches verfahren Mask pattern for lithography, process for their production and lithographic process

Mask pattern for lithography, methods for their manufacture and process lithographic

Lithografiemaske Lithography mask

The lithographic mask fabric and process for its manufacture