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Hirohisa Ota

Canon Inc.

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Publication

Featured researches published by Hirohisa Ota.

Archive | 2005

Imprinting machine and device manufacturing method

Takashi Nakamura; Hirohisa Ota; Eigo Kawakami; Kazuyuki Kasumi; Toshinobu Tokita

Archive | 2004

Immersed projection aligner and device manufacturing method

Atsushi Kitaoka; Hirohisa Ota; 厚志 北岡; 裕久 太田

Archive | 2004

TRANSFER APPARATUS AND DEVICE MANUFACTURING METHOD

Kazuyuki Harumi; Eigo Kawakami; Taku Nakamura; Hirohisa Ota; Toshinobu Tokita; 卓 中村; 裕久 太田; 英悟 川上; 和之 春見; 俊伸 時田

Archive | 2005

Processing apparatus and method

Eigo Kawakami; Hirohisa Ota; Takashi Nakamura; Kazuyuki Kasumi; Toshinobu Tokita

Archive | 2005

Mold for transferring pattern and transfer device

Kazuyuki Harumi; Eigo Kawakami; Taku Nakamura; Hirohisa Ota; Toshinobu Tokita; 卓 中村; 裕久 太田; 英悟 川上; 和之 春見; 俊伸 時田

Archive | 2006

Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same

Toshinobu Tokita; Hirohisa Ota; Eigo Kawakami; Kazuyuki Kasumi; Takashi Nakamura

Archive | 2005

Nano-imprinting mold, device, and method

Kazuyuki Harumi; Eigo Kawakami; Taku Nakamura; Hirohisa Ota; Toshinobu Tokita; 卓 中村; 裕久 太田; 英悟 川上; 和之 春見; 俊伸 時田

Archive | 2004

Aligner, protective method of optical surface and device manufacturing method

Hirohisa Ota; 裕久 太田

Archive | 2004

Processing unit and method therefor

Kazuyuki Harumi; Eigo Kawakami; Taku Nakamura; Hirohisa Ota; Toshinobu Tokita; 卓 中村; 裕久 太田; 英悟 川上; 和之 春見; 俊伸 時田

Archive | 2006

Pattern transferring apparatus and pattern transferring method

Kazuyuki Kasumi; Hirohisa Ota; Eigo Kawakami; Takashi Nakamura; Toshinobu Tokita

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Collaboration

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Eigo Kawakami

Canon Inc.

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Toshinobu Tokita

Canon Inc.

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Kazuyuki Kasumi

Canon Inc.

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Takashi Nakamura

Canon Inc.

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卓 中村

Ube Industries

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