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Dive into the research topics where Hirokazu Kawashima is active.

Publication


Featured researches published by Hirokazu Kawashima.


Japanese Journal of Applied Physics | 2012

High-Performance Thin Film Transistor with Amorphous In2O3–SnO2–ZnO Channel Layer

Shigekazu Tomai; Mami Nishimura; Masayuki Itose; Masahide Matuura; Masashi Kasami; Shigeo Matsuzaki; Hirokazu Kawashima; Futoshi Utsuno; Koki Yano

We have developed a high-mobility and high-processability oxide semiconductor using amorphous In2O3–SnO2–ZnO (a-ITZO) as the channel material. An a-ITZO thin-film transistor (TFT) was fabricated by a back-channel-etch process. Its field effect mobility was more than 20 cm2 V-1 s-1 and its subthreshold swing was 0.4 V s-1, which makes it a promising candidate for next-generation TFTs.


Archive | 2008

Field effect transistor using oxide semicondutor and method for manufacturing the same

Koki Yano; Hirokazu Kawashima; Kazuyoshi Inoue; Shigekazu Tomai; Masashi Kasami


Archive | 2009

FIELD-EFFECT TRANSISTOR, METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTOR, DISPLAY DEVICE USING FIELD-EFFECT TRANSISTOR, AND SEMICONDUCTOR DEVICE

Koki Yano; Kazuyoshi Inoue; Hirokazu Kawashima; Shigekazu Tomai


Archive | 2013

Oxide semiconductor field effect transistor and method for manufacturing the same

Koki Yano; Hirokazu Kawashima; Kazuyoshi Inoue; Shigekazu Tomai; Masashi Kasami


Archive | 2009

SPUTTERING TARGET FOR OXIDE THIN FILM AND PROCESS FOR PRODUCING THE SPUTTERING TARGET

Hirokazu Kawashima; Koki Yano; Futoshi Utsuno; Kazuyoshi Inoue


Archive | 2009

Sputtering target, method for forming amorphous oxide thin film using the same, and method for manufacturing thin film transistor

Koki Yano; Hirokazu Kawashima; Kazuyoshi Inoue


Archive | 2009

Composite oxide sintered body and sputtering target comprising same

Koki Yano; Hirokazu Kawashima


Archive | 2016

FIELD-EFFECT TRANSISTOR, METHOD FOR MANUFACTURING SAME, AND SPUTTERING TARGET

Koki Yano; Hirokazu Kawashima; Kazuyoshi Inoue


Archive | 2012

Oxide sintered body and sputtering target

Futoshi Utsuno; Kazuyoshi Inoue; Hirokazu Kawashima; Masashi Kasami; Koki Yano; Kouta Terai


Archive | 2008

Patterned crystalline semiconductor thin film, method for producing thin film transistor and field effect transistor

Kazuyoshi Inoue; Koki Yano; Futoshi Utsuno; Masashi Kasami; Shigekazu Tomai; Hirokazu Kawashima

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