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Dive into the research topics where Hiromi Shimazu is active.

Publication


Featured researches published by Hiromi Shimazu.


Archive | 2004

Semiconductor device and its production process

Hiromi Shimazu; Tomio Iwasaki; Hiroyuki Ohta; Hideo Miura; Shuji Ikeda


Archive | 1999

Semiconductor device having cobalt silicide film in which diffusion of cobalt atoms is inhibited and its production process

Hiromi Shimazu; Tomio Iwasaki; Hiroyuki Ohta; Hideo Miura; Shuji Ikeda


Archive | 1997

Semiconductor integrated device and method of fabrication thereof

Hiromi Shimazu; Tsuyoshi Baba; Masayuki Suzuki; Hideo Miura


Transactions of the Japan Society of Mechanical Engineers. A | 2007

Development of Low-power Semiconductor Strain Sensor for Mechanical Sensor-net Systems

Hiroyuki Ohta; Takashi Sumigawa; Hiromi Shimazu; Youhei Tanno


Journal of The Society of Materials Science, Japan | 2008

Improvements in Thermal Stability of Cobalt-Silicide Films by Adding Nickel

Hiromi Shimazu; Tomio Iwasaki; Hiroyuki Ohta; Hideo Miura


Transactions of the Japan Society of Mechanical Engineers. A | 2000

Stress-Development Mechanism during Cobalt-Silicide Film Formation.

Hiromi Shimazu; Hideo Miura


Transactions of the Japan Society of Mechanical Engineers. A | 2011

Growth Mechanism and Prevention Measure of Stress-Induced Voids in Copper Interconnects

Hiromi Shimazu; Tomio Iwasaki; Kensuke Ishikawa; Takayuki Oshima


The proceedings of the JSME annual meeting | 2008

1310 Development of Pin-type Load Cell using Semiconductor Strain Sensor

Yohei Tanno; Hiromi Shimazu; Hiroyuki Ohta; Ryuji Takada; Takayuki Shimodaira


The proceedings of the JSME annual meeting | 2007

2512 Strain Monitoring using High-sensitivity Semiconductor Strain Sensor

Hiroyuki Ohta; Hiromi Shimazu; Yohei Tanno


The proceedings of the JSME annual meeting | 2006

3207 Semiconductor Strain Sensor for Measuring Biaxial Strain Field

Hiromi Shimazu; Hiroyuki Ohta; Yohei Tanno

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