Hiroshi Moriuma
Sumitomo Chemical
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Hiroshi Moriuma.
Proceedings of SPIE, the International Society for Optical Engineering | 1999
Yasunori Uetani; Hiroshi Moriuma; Yuko Hirai; Yoshiyuki Takata; Airi Yamada
We reported the novel alkali decomposable additives improve dissolution contrast in quinonediazide type positive resists. We have found that NHSE also improves dissolution contrast in chemically amplified negative resists. Good profiles and resolution are obtained by adding NHSE in the chemically amplified negative i-line resist system.
23rd Annual International Symposium on Microlithography | 1998
Yasunori Uetani; Jun Tomioka; Hiroshi Moriuma; Yoshiko Miya
We have developed the new contrast enhancement method using an alkali decomposable compound. This compound is hydrophobic and water insoluble, but decomposes to water soluble hydrophilic compounds by contact with alkaline developer. This solubility change makes high dissolution contrast between exposed and unexposed area. Good profiles are obtained by addition of this compound to quinonediazide type positive resist.
Archive | 1992
Hiroshi Moriuma; Hirotoshi Nakanishi; Yasunori Uetani
Archive | 1993
Yasunori Uetani; Hiroshi Moriuma
Archive | 2002
Isao Yahagi; Yasunori Uetani; Hiroshi Moriuma
Archive | 1991
Hiroshi Moriuma; Haruyoshi Osaki; Takeshi Hioki; Yasunori Uetani
Archive | 2003
Akira Kamabuchi; Yasunori Uetani; Hiroshi Moriuma
Archive | 2000
Hiroshi Moriuma; Yoshiyuki Takata
Archive | 1994
Takeshi Hioki; Seiko Kurio; Yasunori Uetani; Yasunori Doi; Hiroshi Moriuma
Archive | 1992
Hiroshi Moriuma; Hirotoshi Nakanishi; Yasunori Uetani
