Hiroyuki Hiraiwa | Researchain

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Publication

Featured researches published by Hiroyuki Hiraiwa.

Archive | 1995

Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

Hiroyuki Hiraiwa; Issey Tanaka

Archive | 2001

Projection optical system, production method thereof, and projection exposure apparatus using it

Hiroyuki Hiraiwa; Issey Tanaka

Archive | 1996

Method for producing silica glass used for photolithography

Hiroyuki Hiraiwa

Archive | 1995

Method for producing silica glass for use with light in a vacuum ultraviolet wavelength range, and silica glass and optical member produced by the method

Hiroyuki Hiraiwa; Seishi Fujiwara; Norio Komine

Archive | 1995

Method for producing silica glass for use with light in a vacuum ultraviolet wavelength range

Hiroyuki Hiraiwa; Seishi Fujiwara; Norio Komine

Archive | 2000

Projection optical system, method for producing the same, and projection exposure apparatus using the same

Hiroyuki Hiraiwa; Issey Tanaka

Archive | 1997

Fluorine-containing silica glass

Seishi Fujiwara; Hiroyuki Hiraiwa; Kazuhiro Nakagawa; Shouji Yajima; Norio Komine; Hiroki Jinbo

Archive | 2000

Method of manufacturing silica glass member and silica glass member obtained by the method

Kazuhiro Nakagawa; Hiroyuki Hiraiwa

Archive | 1997

Method for producing a silica glass

Norio Komine; Hiroyuki Hiraiwa

Archive | 1994

Optical member and projection optical system for photolithography

Hiroyuki Hiraiwa; Hiroki Jinbo; 弘之平岩; 宏樹神保

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Collaboration

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Norio Komine

Nikon

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Hiroki Jinbo

Nikon

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Kazuhiro Nakagawa

Nikon

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Issey Tanaka

Nikon

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Seishi Fujiwara

Nikon

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Shouji Yajima

Nikon

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Katsuya Miyoshi

Nikon

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Satoru Oshikawa

Nikon

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Yasuji Ishida

Nikon

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Masanori Hashimoto

Kurita Water Industries Ltd.

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