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Hiroyuki Ode

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Publication

Featured researches published by Hiroyuki Ode.

Archive | 2013

High performance dielectric stack for DRAM capacitor

Sandra Malhotra; Wim Deweerd; Hanhong Chen; Xiangxin Rui; Hiroyuki Ode; Mitsuhiro Horikawa; Kenichi Koyanagi

Archive | 2011

Method for Fabricating a DRAM Capacitor

Karthik Ramani; Nobumichi Fuchigami; Wim Deweerd; Hanhong Chen; Hiroyuki Ode

Archive | 2013

METHOD FOR FABRICATING A DRAM CAPACITOR HAVING INCREASED THERMAL AND CHEMICAL STABILITY

Karthik Ramani; Wim Deweerd; Hiroyuki Ode

Archive | 2012

Molybdenum oxide top electrode for DRAM capacitors

Hanhong Chen; Wim Deweerd; Hiroyuki Ode

Archive | 2013

Top electrode templating for DRAM capacitor

Sandra Malhotra; Hanhong Chen; Wim Deweerd; Hiroyuki Ode

Archive | 2013

ENHANCED NON-NOBLE ELECTRODE LAYERS FOR DRAM CAPACITOR CELL

Hanhong Chen; Wim Deweerd; Edward Haywood; Sandra Malhotra; Hiroyuki Ode

Archive | 2013

Blocking Layers for Leakage Current Reduction in DRAM Devices

Sandra Malhotra; Hanhong Chen; Wim Deweerd; Hiroyuki Ode

Archive | 2013

Manufacturable high-k DRAM MIM capacitor structure

Sandra Malhotra; Wim Deweerd; Hiroyuki Ode

Archive | 2012

High Work Function, Manufacturable Top Electrode

Sandra Malhotra; Hanhong Chen; Wim Deweerd; Arthur Gevondyan; Hiroyuki Ode

Archive | 2011

METHOD OF PROCESSING MIM CAPACITORS TO REDUCE LEAKAGE CURRENT

Hanhong Chen; Wim Deweerd; Xiangxin Rui; Sandra Malhotra; Hiroyuki Ode

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Collaboration

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Sandra Malhotra

University of Michigan

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Karthik Ramani

GlobalFoundries

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Mitsuhiro Horikawa

Hitachi

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Nobumichi Fuchigami

GlobalFoundries

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Kenichi Koyanagi

Hitachi

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