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Hiroyuki Ogura

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Publication

Featured researches published by Hiroyuki Ogura.

Archive | 2003

Substrate treating apparatus

Yoshiteru Fukutomi; Tsuyoshi Mitsuhashi; Hiroyuki Ogura; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

SUBSTRATE TREATING APPARATUS WITH INTER-UNIT BUFFERS

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2014

SUBSTRATE TREATING APPARATUS WITH SUBSTRATE REORDERING

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

Multi-line substrate treating apparatus

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

MULTI-STORY SUBSTRATE TREATING APPARATUS WITH FLEXIBLE TRANSPORT MECHANISMS

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

Substrate treating apparatus with parallel substrate treatment lines

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

Parallel substrate treatment for a plurality of substrate treatment lines

Yoshiteru Fukutomi; Tsuyoshi Mitsuhashi; Hiroyuki Ogura; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2012

Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units

Yoshiteru Fukutomi; Tsuyoshi Mitsuhashi; Hiroyuki Ogura; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

Archive | 2008

Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates

Hiroyuki Ogura; Tsuyoshi Mitsuhashi; Yoshiteru Fukutomi; Kenya Morinishi; Yasuo Kawamatsu; Hiromichi Nagashima

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