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Hitoshi Tsuji

Toshiba

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Publication

Featured researches published by Hitoshi Tsuji.

Archive | 1996

Wafer stage apparatus for attracting and holding semiconductor wafer

Hitoshi Tsuji

Archive | 1986

Method of manufacturing a semiconductor device involving sidewall spacer formation

Hitoshi Tsuji; Tiharu Kato; Kiyoshi Takaoki

Archive | 1991

Method of etching isolation and alignment mark regions using a single resist mask

Hitoshi Tsuji; Hiroshi Haraguchi

Archive | 1990

Making a semiconductor device with ammonia treatment of photoresist

Hitoshi Tsuji; Hiroshi Haraguchi; Osamu Hirata; Hidetsuna Hashimoto

Archive | 1991

Method of forming contact holes

Hiroshi Haraguchi; Hitoshi Tsuji; Yasuhisa Yoshida

Archive | 1991

Method of forming a thin film pattern with a trapezoidal cross section

Hiroshi Haraguchi; Hitoshi Tsuji; Yasuto Otani; Kuniaki Kumamaru

Archive | 1988

Method of forming micro patterns

Hidetsuna Hashimoto; Tiharu Kato; Hitoshi Tsuji

Archive | 1993

Method of manufacturing HEMT device using novolak-based positive-type resist

Hiroto Misawa; Hitoshi Tsuji

Archive | 1996

Method of making a negative photoresist image

Hiroshi Haraguchi; Hitoshi Tsuji

Archive | 1997

Method of manufacturing a semiconductor device, including a step of forming a pattern on a photo-resist film

Hitoshi Tsuji; o Intellectual Pty Division; Hiroshi Haraguchi

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Collaboration

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Hiroshi Haraguchi

Toshiba

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Kuniaki Kumamaru

Toshiba

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Yasuto Otani

Toshiba

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Hidetsuna Hashimoto

Toshiba

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Osamu Hirata

Toshiba

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Tiharu Kato

Toshiba

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Hiroto Misawa

Toshiba

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Kiyoshi Takaoki

Toshiba

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Yasuhisa Yoshida

Toshiba

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o Intellectual Pty Division

Toshiba

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