Ho Bun Chan

Nonlinear micromechanical Casimir oscillator.

The Casimir force between uncharged metallic surfaces originates from quantum-mechanical zero-point fluctuations of the electromagnetic field. We demonstrate that this quantum electrodynamical effect has a profound influence on the oscillatory behavior of microstructures when surfaces are in close proximity (< or =100 nm). Frequency shifts, hysteretic behavior, and bistability caused by the Casimir force are observed in the frequency response of a periodically driven micromachined torsional oscillator.

1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss

We present a microelectromechanical systems-based beam steering optical crossconnect switch core with port count exceeding 1100, featuring mean fiber-to-fiber insertion loss of 2.1 dB and maximum insertion loss of 4.0 dB across all possible connections. The challenge of efficient measurement and optimization of all possible connections was met by an automated testing facility. The resulting connections feature optical loss stability of better than 0.2 dB over days, without any feedback control under normal laboratory conditions.

Beam-steering micromirrors for large optical cross-connects

This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 /spl times/ 256- and 1024 /spl times/ 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.

Casimir Forces and Quantum Electrodynamical Torques: Physics and Nanomechanics

This paper discusses recent developments on quantum electrodynamical (QED) phenomena, such as the Casimir effect, and their use in nanomechanics and nanotechnology in general. Casimir forces and torques arise from quantum fluctuations of vacuum or, more generally, from the zero-point energy of materials and their dependence on the boundary conditions of the electromagnetic fields. Because the latter can be tailored, this raises the interesting possibility of designing QED forces for specific applications. After a concise review of the field in an historical perspective, high precision measurements of the Casimir force using microelectromechanical systems (MEMS) technology and applications of the latter to nonlinear oscillators are presented, along with a discussion of its use in nanoscale position sensors. Then, experiments that have demonstrated the role of the skin-depth effect in reducing the Casimir force are presented. The dielectric response of materials enters in a nonintuitive way in the modification of the Casimir-Lifshitz force between dielectrics through the dielectric function at imaginary frequencies epsiv(ixi). The latter is illustrated in a dramatic way by experiments on materials that can be switched between a reflective and a transparent state (hydrogen switchable mirrors). Repulsive Casimir forces between solids separated by a fluid with epsiv(ixi) intermediate between those of the solids over a large frequency range is discussed, including ongoing experiments aimed at its observation. Such repulsive forces can be used to achieve quantum floatation in a virtually frictionless environment, a phenomenon that could be exploited in innovative applications to nanomechanics. The last part of the paper deals with the elusive QED torque between birefringent materials and efforts to observe it. We conclude by highlighting future important directions

Measurement of the Casimir Force between a Gold Sphere and a Silicon Surface with Nanoscale Trench Arrays

We report measurements of the Casimir force between a gold sphere and a silicon surface with an array of nanoscale, rectangular corrugations using a micromechanical torsional oscillator. At distances between 150 and 500 nm, the measured force shows significant deviations from the pairwise additive formulism, demonstrating the strong dependence of the Casimir force on the shape of the interacting bodies. The observed deviation, however, is smaller than the calculated values for perfectly conducting surfaces, possibly due to the interplay between finite conductivity and geometry effects.

Effects of electrical leakage currents on MEMS reliability and performance

Electrostatically driven MEMS devices commonly operate with electric fields as high at 10/sup 8/ V/m applied across the dielectric between electrodes. Even with the best mechanical design, the electrical design of these devices has a large impact both on performance (e.g., speed and stability) and on reliability (e.g., corrosion and dielectric or gas breakdown). In this paper, we discuss the reliability and performance implications of leakage currents in the bulk and on the surface of the dielectric insulating the drive (or sense) electrodes from one another. Anodic oxidation of poly-silicon electrodes can occur very rapidly in samples that are not hermetically packaged. The accelerating factors are presented along with an efficient early-warning scheme. The relationship between leakage currents and the accumulation of quasistatic charge in dielectrics are discussed, along with several techniques to mitigate charging and the associated drift in electrostatically actuated or sensed MEMS devices. Two key parameters are shown to be the electrode geometry and the conductivity of the dielectric. Electrical breakdown in submicron gaps is presented as a function of packaging gas and electrode spacing. We discuss the tradeoffs involved in choosing gap geometries and dielectric properties that balance performance and reliability.

Optical transmission through double-layer metallic subwavelength slit arrays

We present measurements of transmission of infrared radiation through double-layer metallic grating structures. Each metal layer contains an array of subwavelength slits and supports transmission resonance in the absence of the other layer. The two metal layers are fabricated in close proximity to allow coupling of the evanescent field on individual layers. The transmission of the double layer is found to be surprisingly large at particular wavelengths, even when no direct line of sight exists through the structure as a result of the lateral shifts between the two layers. We perform numerical simulations using rigorous coupled wave analysis to explain the strong dependence of the peak transmission on the lateral shift between the metal layers.

Constraining New Forces in the Casimir Regime Using the Isoelectronic Technique

We report the first isoelectronic differential force measurements between an Au-coated probe and two Au-coated films, made out of Au and Ge. These measurements, performed at submicron separations using soft microelectromechanical torsional oscillators, eliminate the need for a detailed understanding of the probe-film Casimir interaction. The observed differential signal is directly converted into limits on the parameters {alpha} and {lambda} which characterize Yukawa-like deviations from Newtonian gravity. We find {alpha} < or approx. 10{sup 12} for {lambda}{approx}200 nm, an improvement of {approx}10 over previous limits.

Casimir forces on a silicon micromechanical chip

Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes.

Noise-activated switching in a driven nonlinear micromechanical oscillator

We study noise induced switching in systems far from equilibrium by using an underdamped micromechanical torsional oscillator driven into the nonlinear regime. Within a certain range of driving frequencies, the oscillator possesses two stable dynamical states with different oscillation amplitudes. We induce the oscillator to escape from one dynamical state into the other by introducing noise in the excitation. By measuring the rate of random transitions as a function of noise intensity, we deduce the activation energy as a function of frequency detuning. Close to the critical point, the activation energy is expected to display system-independent scaling. The measured critical exponent is in good agreement with variational calculations and asymptotic scaling theory.