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Hoeller Frank

Carl Zeiss AG

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Archive | 2002

System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren

Hoeller Frank; Werner Juergen; Gumbrell Edward; Spieweck Michael

Archive | 2003

Wringing-together optical elements meeting prescribed standards of form and surface quality, first varies surface profile using active material to enable exact positioning

Moeller Timo; Ros-Mesemer Martin; Hoeller Frank

Archive | 2002

Interferometersystem und Meß-/Bearbeitungswerkzeug

Hauger Christoph; Lasser Theo; Siegel Augustin; Hoeller Frank; Knupfer Klaus; Monz Ludwin; Gross Herbert

Archive | 2003

Receptacle device for optical element e.g. lens for microlithography, uses retaining devices with active material, such as ferroelectric material

Moeller Timo; Ros-Mesemer Martin; Hoeller Frank

Archive | 2011

DEVICE, METHOD, AND REFLECTOR ARRANGEMENT FOR DETERMINING POSITION

Spruck Bernd; Alvarez Diez Cristina; Brattke Simon; Wittig Lars-Christian; Schmidt Oliver; Hoeller Frank

Archive | 2013

Verfahren und System zum Ermitteln einer Position und Orientierung eines Objekts in einem Bezugssystem

Hoeller Frank; Schmidt Oliver

Archive | 2011

Vorrichtung, Verfahren und Reflektoranordnung zur Positionsbestimmung

Spruck Bernd; Alvarez Diez Christina; Brattke Simon; Wittig Lars-Christian; Schmidt Oliver; Hoeller Frank

Archive | 2009

SYSTEM AND METHOD FOR MEASURING RELATIVE POSITIONS AND/OR ORIENTATIONS OF TWO OBJECTS, AS WELL AS BEAM GUIDANCE DEVICE, INTERFEROMETER DEVICE AND DEVICE FOR CHANGING OPTICAL PATH LENGTH USED IN THE SYSTEM AND THE METHOD

Hoeller Frank; Werner Juergen; Gumbrell Edward; Spieweck Michael

Archive | 2003

SYSTEM AND METHOD FOR MEASURING RELATIVE POSITION AND/OR DIRECTION OF TWO OBJECTS, AND BEAM GUIDING DEVICE, INTERFEROMETER AND DEVICE FOR CHANGING OPTICAL PATH LENGTH USED IN SUCH SYSTEM AND METHOD

Hoeller Frank; Werner Juergen; Gumbrell Edward; Spieweck Michael

Archive | 2017

METHOD FOR CALIBRATING AN OPTICAL ARRANGEMENT

Hoeller Frank; Paul Oliver; Widulle Frank

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Gumbrell Edward

Carl Zeiss AG

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Schmidt Oliver

Carl Zeiss AG

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Spieweck Michael

Carl Zeiss AG

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Spruck Bernd

Carl Zeiss AG

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Werner Juergen

Carl Zeiss AG

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Brattke Simon

Carl Zeiss AG

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Moeller Timo

Carl Zeiss AG

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Ros-Mesemer Martin

Carl Zeiss AG

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Wittig Lars-Christian

Carl Zeiss AG

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Alvarez Diez Christina

Carl Zeiss AG

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