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Dive into the research topics where Holger Luthje is active.

Publication


Featured researches published by Holger Luthje.


Archive | 1995

Tool for forming and cutting apparatusses and method of making a coated tool

Stefan Zamel; Holger Luthje; Georg Ketteler; Heinz Prof. Dr. Dimigen


Archive | 1977

Method of structuring thin layers

Hubertus Hübsch; Ursula Convertini; Heinz Dimigen; Holger Luthje


Archive | 1988

Method of manufacturing a mask support of sic for x-ray lithography masks

Angelika Bruns; Margret Harms; Holger Luthje; Bernd Matthiessen


Archive | 1982

Radiation lithography mask and method of manufacturing same

Margret Harms; Holger Luthje; Bernd Matthiessen


Archive | 1989

Method of manufacturing a mask support of SiC for radiation lithography masks

Margret Harms; Holger Luthje; Bernd Matthiesen


Archive | 1983

Method of manufacturing a mask for obtaining texturised patterns in resist layers using X-ray lithography

Arno Lentfer; Holger Luthje


Archive | 1973

Chemically highly resistant material

Heinz Dimigen; Hubertus Hübsch; Holger Luthje


Archive | 1986

Mask with magnesium diaphragm for X-ray lithography

Arno Lentfer; Holger Luthje


Archive | 1981

Method of manufacturing a thin-film magnetic field sensor

Margret Harms; Holger Luthje


Archive | 1988

Method of manufacturing a mask for radiation lithography

Angelika Bruns; Waldemar Gotze; Margret Harms; Holger Luthje

Collaboration


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