Hong X. Tang

Nanomoulding with amorphous metals

Nanoimprinting promises low-cost fabrication of micro- and nano-devices by embossing features from a hard mould onto thermoplastic materials, typically polymers with low glass transition temperature. The success and proliferation of such methods critically rely on the manufacturing of robust and durable master moulds. Silicon-based moulds are brittle and have limited longevity. Metal moulds are stronger than semiconductors, but patterning of metals on the nanometre scale is limited by their finite grain size. Amorphous metals (metallic glasses) exhibit superior mechanical properties and are intrinsically free from grain size limitations. Here we demonstrate direct nanopatterning of metallic glasses by hot embossing, generating feature sizes as small as 13 nm. After subsequently crystallizing the as-formed metallic glass mould, we show that another amorphous sample of the same alloy can be formed on the crystallized mould. In addition, metallic glass replicas can also be used as moulds for polymers or other metallic glasses with lower softening temperatures. Using this ‘spawning’ process, we can massively replicate patterned surfaces through direct moulding without using conventional lithography. We anticipate that our findings will catalyse the development of micro- and nanoscale metallic glass applications that capitalize on the outstanding mechanical properties, microstructural homogeneity and isotropy, and ease of thermoplastic forming exhibited by these materials.

Harnessing optical forces in integrated photonic circuits

The force exerted by photons is of fundamental importance in light–matter interactions. For example, in free space, optical tweezers have been widely used to manipulate atoms and microscale dielectric particles. This optical force is expected to be greatly enhanced in integrated photonic circuits in which light is highly concentrated at the nanoscale. Harnessing the optical force on a semiconductor chip will allow solid state devices, such as electromechanical systems, to operate under new physical principles. Indeed, recent experiments have elucidated the radiation forces of light in high-finesse optical microcavities, but the large footprint of these devices ultimately prevents scaling down to nanoscale dimensions. Recent theoretical work has predicted that a transverse optical force can be generated and used directly for electromechanical actuation without the need for a high-finesse cavity. However, on-chip exploitation of this force has been a significant challenge, primarily owing to the lack of efficient nanoscale mechanical transducers in the photonics domain. Here we report the direct detection and exploitation of transverse optical forces in an integrated silicon photonic circuit through an embedded nanomechanical resonator. The nanomechanical device, a free-standing waveguide, is driven by the optical force and read out through evanescent coupling of the guided light to the dielectric substrate. This new optical force enables all-optical operation of nanomechanical systems on a CMOS (complementary metal-oxide-semiconductor)-compatible platform, with substantial bandwidth and design flexibility compared to conventional electrical-based schemes.

Tunable bipolar optical interactions between guided lightwaves

Attractive and repulsive optical forces between coupled photonic waveguides are demonstrated – previously, only attractive forces had been observed. The sign of the force can be controlled by varying the relative phase between the guided modes. This effect could be used in planar light-force devices on a CMOS-compatible platform.

Nanoelectromechanical Resonator Arrays for Ultrafast, Gas-Phase Chromatographic Chemical Analysis

Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.

Broadband all-photonic transduction of nanocantilevers

Nanoelectromechanical systems based on cantilevers have consistently set records for sensitivity in measurements of displacement, force and mass over the past decade. Continued progress will require the integration of efficient transduction on a chip so that nanoelectromechanical systems may be operated at higher speeds and sensitivities. Conventional electrical schemes have limited bandwidth, and although optical methods are fast, they are subject to the diffraction limit. Here, we demonstrate the integration of nanocantilevers on a silicon photonic platform with a non-interferometric transduction scheme that avoids the diffraction limit by making use of near-field effects in optomechanical interactions. The use of a non-interferometric method means that a coherent light source is not required, making the monolithic integration of optomechanical systems with on-chip light sources feasible. We further demonstrate optomechanical multiplexing of an array of ten nanocantilevers with a displacement sensitivity of 40 fm Hz(-1/2).

Optical frequency comb generation from aluminum nitride microring resonator

Aluminum nitride (AlN) is an appealing nonlinear optical material for on-chip wavelength conversion. Here we report optical frequency comb generation from high-quality-factor AlN microring resonators integrated on silicon substrates. By engineering the waveguide structure to achieve near-zero dispersion at telecommunication wavelengths and optimizing the phase matching for four-wave mixing, frequency combs are generated with a single-wavelength continuous-wave pump laser. Further, the Kerr coefficient (n₂) of AlN is extracted from our experimental results.

Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing

Photonic miniaturization requires seamless integration of linear and nonlinear optical components to achieve passive and active functions simultaneously. Among the available material systems, silicon photonics holds immense promise for optical signal processing and on-chip optical networks. However, silicon is limited to wavelengths above 1.1 μm and does not provide the desired lowest order optical nonlinearity for active signal processing. Here we report the integration of aluminum nitride (AlN) films on silicon substrates to bring active functionalities to chip-scale photonics. Using CMOS-compatible sputtered thin films we fabricate AlN-on-insulator waveguides that exhibit low propagation loss (0.6 dB/cm). Exploiting AlNs inherent Pockels effect we demonstrate electro-optic modulation up to 4.5 Gb/s with very low energy consumption (down to 10 fJ/bit). The ultrawide transparency window of AlN devices also enables high speed modulation at visible wavelengths. Our low cost, wideband, carrier-free photonic circuits hold promise for ultralow power and high-speed signal processing at the microprocessor chip level.

Active Silicon Integrated Nanophotonics: Ferroelectric BaTiO3 Devices

The integration of complex oxides on silicon presents opportunities to extend and enhance silicon technology with novel electronic, magnetic, and photonic properties. Among these materials, barium titanate (BaTiO3) is a particularly strong ferroelectric perovskite oxide with attractive dielectric and electro-optic properties. Here we demonstrate nanophotonic circuits incorporating ferroelectric BaTiO3 thin films on the ubiquitous silicon-on-insulator (SOI) platform. We grow epitaxial, single-crystalline BaTiO3 directly on SOI and engineer integrated waveguide structures that simultaneously confine light and an RF electric field in the BaTiO3 layer. Using on-chip photonic interferometers, we extract a large effective Pockels coefficient of 213 ± 49 pm/V, a value more than six times larger than found in commercial optical modulators based on lithium niobate. The monolithically integrated BaTiO3 optical modulators show modulation bandwidth in the gigahertz regime, which is promising for broadband applications.

Strongly coupled magnons and cavity microwave photons.

We realize a cavity magnon-microwave photon system in which a magnetic dipole interaction mediates strong coupling between the collective motion of a large number of spins in a ferrimagnet and the microwave field in a three-dimensional cavity. By scaling down the cavity size and increasing the number of spins, an ultrastrong coupling regime is achieved with a cooperativity reaching 12,600. Interesting dynamic features including classical Rabi-like oscillation, magnetically induced transparency, and the Purcell effect are demonstrated in this highly versatile platform, highlighting its great potential for coherent information processing.

Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate

Superconducting nanowire single-photon detectors are an ideal match for integrated quantum photonic circuits due to their high detection efficiency for telecom wavelength photons. Quantum optical technology also requires single-photon detection with low dark count rate and high timing accuracy. Here we present very low noise superconducting nanowire single-photon detectors based on NbTiN thin films patterned directly on top of Si3N4 waveguides. We systematically investigate a large variety of detector designs and characterize their detection noise performance. Milli-Hz dark count rates are demonstrated over the entire operating range of the nanowire detectors which also feature low timing jitter. The ultra-low dark count rate, in combination with the high detection efficiency inherent to our travelling wave detector geometry, gives rise to a measured noise equivalent power at the 10−20 W/Hz1/2 level.